Micro-Grinding Performance of Hard-Brittle Chip Materials in Precision Micro-Grinding Microgroove

doi:10.1007/s12204-018-2025-7

Journal of Shanghai Jiao Tong University (Science) ›› 2018, Vol. 23 ›› Issue (Sup. 1): 70-76.doi: 10.1007/s12204-018-2025-7

Micro-Grinding Performance of Hard-Brittle Chip Materials in Precision Micro-Grinding Microgroove

ZHANG Long (张龙), XIE Jin (谢晋), ZHU Limin (朱利民), LU Yanjun (鲁艳军)

(1. State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China; 2. School of Mechanical and Automotive Engineering, South China University of Technology, Guangzhou 510640, China; 3. College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen 518060, Guangdong, China)

出版日期:2018-12-28 发布日期:2018-12-26
通讯作者: XIE Jin (谢晋) E-mail: jinxie@scut.edu.cn

Micro-Grinding Performance of Hard-Brittle Chip Materials in Precision Micro-Grinding Microgroove

ZHANG Long (张龙), XIE Jin (谢晋), ZHU Limin (朱利民), LU Yanjun (鲁艳军)

(1. State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China; 2. School of Mechanical and Automotive Engineering, South China University of Technology, Guangzhou 510640, China; 3. College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen 518060, Guangdong, China)

Online:2018-12-28 Published:2018-12-26
Contact: XIE Jin (谢晋) E-mail: jinxie@scut.edu.cn

摘要/Abstract

摘要： The micro-structure on hard-brittle chip materials (HBCMs) surface can produce predominant functions and features. The micro-grinding with diamond wheel micro-tip is an efficient method to machine microstructure on HBCMs. However, different HBCMs and crystal orientation may have a significant influence on the micro-grinding performance. In this paper, the micro-grinding performance along different crystal orientation of HBCMs is investigated. First, a dressed 600# diamond grinding wheel is used to micro-grind micro-structure on HBCMs. Then, the experiment of micro-grinding force test is completed. Finally, the quality of microgroove, the grinding ratio and the micro-grinding force are investigated and they are related to the crystal orientation of HBCMs. It is shown that the stronger resistance to the micro-crack propagation has the best quality of microgroove and the smallest grinding ratio. Moreover, the hardest single-crystal SiC has the best machinability and the micro-grinding force is 38.9%, 10.8% and 46.8% less than the one of sapphire, single-crystal Si and quartz glass, respectively. The direction to micro-grind easily is the crystal orientation 10ˉ10 for single-crystal SiC and sapphire. In addition, the micro-grinding force increases with the increase of the micro-grinding depth and feed rate and decreases with the increase of the grinding wheel speed.

关键词: precision micro-grinding, crystal orientation , hard-brittle chip materials (HBCMs)

Abstract: The micro-structure on hard-brittle chip materials (HBCMs) surface can produce predominant functions and features. The micro-grinding with diamond wheel micro-tip is an efficient method to machine microstructure on HBCMs. However, different HBCMs and crystal orientation may have a significant influence on the micro-grinding performance. In this paper, the micro-grinding performance along different crystal orientation of HBCMs is investigated. First, a dressed 600# diamond grinding wheel is used to micro-grind micro-structure on HBCMs. Then, the experiment of micro-grinding force test is completed. Finally, the quality of microgroove, the grinding ratio and the micro-grinding force are investigated and they are related to the crystal orientation of HBCMs. It is shown that the stronger resistance to the micro-crack propagation has the best quality of microgroove and the smallest grinding ratio. Moreover, the hardest single-crystal SiC has the best machinability and the micro-grinding force is 38.9%, 10.8% and 46.8% less than the one of sapphire, single-crystal Si and quartz glass, respectively. The direction to micro-grind easily is the crystal orientation 10ˉ10 for single-crystal SiC and sapphire. In addition, the micro-grinding force increases with the increase of the micro-grinding depth and feed rate and decreases with the increase of the grinding wheel speed.

Key words: precision micro-grinding, crystal orientation , hard-brittle chip materials (HBCMs)

中图分类号:

TH 16

ZHANG Long (张龙), XIE Jin (谢晋), ZHU Limin (朱利民), LU Yanjun (鲁艳军). Micro-Grinding Performance of Hard-Brittle Chip Materials in Precision Micro-Grinding Microgroove[J]. Journal of Shanghai Jiao Tong University (Science), 2018, 23(Sup. 1): 70-76.

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