Decoupling and Synchronization Control of Asymmetric Flexure-Linked Dual-Drive Gantry Stage

doi:10.16183/j.cnki.jsjtu.2021.456

Abstract

Abstract:

A decoupling and synchronization control strategy based on a model-compensated extended state observer is proposed in control of a dual-drive gantry positioning stage with asymmetric flexure-linked structures. A gantry dynamic model considering the features of the flexure-linked structures and the impact of load acceleration is built using Lagrangian equations. Translational and rotational control loops are designed according to this model, while extended state observers with compensation of known coupling items in the model are deployed in each control loop to estimate and attenuate the total disturbances composed of unmodeled dynamics, unknown couplings, etc. The experimental results show that the proposed control strategy, which is simple to realize and requires few parameters to be measured, can effectively decouple the dynamics of dual axes and attenuates disturbances, greatly improving the dynamic response and synchronization accuracy of the gantry stage.

Key words: asymmetric flexure-linked structure, dual-drive gantry positioning stage, decoupling, synchronization control, extended state observer

CLC Number:

TH-39
TP273

WEI Guangyu, GU Chaochen, YANG Shusheng, GUAN Xinping. Decoupling and Synchronization Control of Asymmetric Flexure-Linked Dual-Drive Gantry Stage[J]. Journal of Shanghai Jiao Tong University, 2023, 57(5): 593-600.

Figures/Tables 8

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参数	含义	取值
m_C₁/kg	C1侧底座(含柔性支撑)总质量	9.9
m_C₂/kg	C2侧底座(含柔性支撑)总质量	9.85
m_H/kg	工作头(移动负载)质量	7.6
m_B/kg	横梁质量	26.8
J_H/(kg·m²)	工作头绕自身重心的转动惯量	0.038
J_B/(kg·m²)	横梁绕自身重心的转动惯量	3.2
d_BH/m	工作头(移动负载)重心偏移量	0.1
L_r/m	龙门试验台跨度	1.2
K_r/(N·m·rad^-1)	回转柔性支撑的转动刚度	28 500
K_s/(N·m^-1)	偏扭柔性支撑的刚度	125 000
c_g1,c_g2/(N·m^-1·s)	双驱轴导轨阻尼系数	20.3
c_y/(N·m^-1·s)	横梁轴导轨阻尼系数	32.5
c_b/(N·m·rad^-1·s)	回转柔性支撑旋转阻尼系数	300
c_bg/(N·m^-1·s)	偏扭柔性支撑阻尼系数	3 750
F_C1,F_C2	两侧电动机推力	—
F_Y	横梁轴电动机推力	—