Decoupling and Synchronization Control of Asymmetric Flexure-Linked Dual-Drive Gantry Stage
WEI Guangyu, GU Chaochen, YANG Shusheng, GUAN Xinping
Journal of Shanghai Jiao Tong University . 2023, (5): 593 -600 .  DOI: 10.16183/j.cnki.jsjtu.2021.456