基于微机电系统的水下灵巧手触觉力测量传感器

doi:10.16183/j.cnki.jsjtu.2018.01.012

摘要/Abstract

摘要： 为了实现深水环境下水下灵巧手抓取目标的定位及触觉力感知，设计了阵列式触觉力测量传感器.以硅杯作为力敏感核心，利用胶囊式差压状结构实现了水的静态压力矢量叠加下的触觉力测量，并消除了水的静态压力对触觉力测量的影响.利用弹性力学与板壳理论分析了方形硅杯底部变形与应力的解析解，并与有限元法的分析结果加以对比.结果表明，所设计的灵巧手触觉力测量传感器具有样本抓取的触觉感知及位置感知，其胶囊式差压状结构使得触觉力测量传感器能够消除水的静态压力的影响，硅杯式测量结构具有灵敏度高、误差小、输出应力大的特点.

关键词: 水下灵巧手, 触觉力测量, 差压补偿, 压阻式传感器, 硅杯

Abstract: In order to achieve the position determination and force tactile perception in underwater dexterous hand grasping target under deep water environment, an array of tactile force measurement sensor is designed. The silicon cup is used as the force sensitive core, the tactile force measurement of the static pressure vector superposition of water is realized by the capsule differential pressure structure, and the influence of the static pressure of water on the tactile force measurement is eliminated. The analytical solution for the deformation and stress of silicon cup square bottom is analyzed by the elastic mechanics and shell theory. The results show that the tactile force sensor of underwater dexterous hand achieves the tactile perception and position determination of the target gripping. The capsule differential pressure structure makes the tactile force sensor eliminate the effect of the static pressure. The silicon cup measurement structure has the advantages of high sensitivity, small error, and high output characteristics of stress.

Key words: underwater dexterous hand, tactile force measurement, pressure compensation, piezoresistive sensor, silicon cup

中图分类号:

TP 212

张建军1，刘卫东1，张溢文2，汤伟江1,2. 基于微机电系统的水下灵巧手触觉力测量传感器[J]. 上海交通大学学报（自然版）, 2018, 52(1): 76-82.

ZHANG Jianjun1,LIU Weidong1,ZHANG Yiwen2,TANG Weijiang1,2. Tactile Force Sensor of Underwater Dexterous Hand Based on Micro Electromechanical System[J]. Journal of Shanghai Jiaotong University, 2018, 52(1): 76-82.

参考文献

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