上海交通大学学报 ›› 2020, Vol. 54 ›› Issue (5): 499-506.doi: 10.16183/j.cnki.jsjtu.2020.05.007
陈乐,王英,李海华
发布日期:2020-06-02
通讯作者:
王英,副教授,电话(Tel.): 18016200396;E-mail:wangying@sjtu.edu.cn.
作者简介:陈乐(1992-),男,甘肃省白银市人,硕士生,主要研究方向为柔性电子皮肤的制造工艺与应用.
基金资助:CHEN Le,WANG Ying,LI Haihua
Published:2020-06-02
摘要: 具有高灵敏度和快速响应时间的电子皮肤在人体信号监测和机器人领域有广阔的应用前景.模仿人体皮肤的结构,提出了一种自锁型的电子皮肤,上层为规则的金字塔阵列,下层为不规则的起伏.该器件最高灵敏度达到190.4kPa-1,最低探测压力为32Pa,响应时间为8ms,回复时间为8ms,在 3000 次循环载荷下表现出很好的稳定性.该器件制备工艺简单,模具可循环使用,满足大规模生产的条件.将该器件应用于分辨不同的机械力和监测人体的生理信号,表现出良好的性能,发展潜力巨大.
中图分类号:
陈乐,王英,李海华. 基于三明治结构的高灵敏度新型电子皮肤[J]. 上海交通大学学报, 2020, 54(5): 499-506.
CHEN Le,WANG Ying,LI Haihua. A New Electronic Skin with High Sesitivity Based on Sandwich Structure[J]. Journal of Shanghai Jiaotong University, 2020, 54(5): 499-506.
| [1]HAMMOCK M L, CHORTOS A, TEE B C K, et al. 25th anniversary article: The evolution of electronic skin (E-skin): A brief history, design considerations, and recent progress[J]. Advanced Materials, 2013, 25(42): 5997-6038. [2]LEE J, KIM S, LEE J, et al. A stretchable strain sensor based on a metal nanoparticle thin film for human motion detection[J]. Nanoscale, 2014, 6(20): 11932-11939. [3]JUNG S, KIM J H, KIM J, et al. Reverse-micelle-induced porous pressure-sensitive rubber for wearable human-machine interfaces[J]. Advanced Materials, 2014, 26(28): 4825-4830. [4]冯雪, 陆炳卫, 吴坚, 等. 可延展柔性无机微纳电子器件原理与研究进展[J]. 物理学报, 2014, 63(1): 014201. FENG Xue, LU Bingwei, WU Jian, et al. Principles and research progress of ductile flexible inorganic micro/nanoelectronic devices[J]. Journal of Physics, 2014, 63(1): 014201. [5]YU G, HU J, TAN J, et al. A wearable pressure sensor based on ultra-violet/ozone microstructured carbon nanotube/polydimethylsiloxane arrays for electronic skins[J]. Nanotechnology, 2018, 29(11): 115502. [6]KHANG D Y, JIANG H, HUANG Y, et al. A stretchable form of single-crystal silicon for high-performance electronics on rubber substrates[J]. Science, 2006, 311(5758): 208-212. [7]KIM D H, XIAO J, SONG J, et al. Stretchable, curvilinear electronics based on inorganic materials[J]. Advanced Materials, 2010, 22(19): 2108-2124. [8]FRUTIGER A, MUTH J T, VOGT D M, et al. Capacitive soft strain sensors via multicore-shell fiber printing[J]. Advanced Materials, 2015, 27(15): 2440-2446. [9]JIA J, HUANG G, DENG J, et al. Skin-inspired flexible and high-sensitivity pressure sensors based on rGO films with continuous-gradient wrinkles[J]. Nanoscale, 2019, 11(10): 4258-4266. [10]PARK J, KIM J, HONG J, et al. Tailoring force sensitivity and selectivity by microstructure engineering of multidirectional electronic skins[J]. NPG Asia Materials, 2018, 10(4): 163-176. [11]PARK J, LEE Y, HONG J, et al. Giant tunneling piezoresistance of composite elastomers with interlocked microdome arrays for ultrasensitive and multimodal electronic skins[J]. ACS Nano, 2014, 8(5): 4689-4697. [12]PARK H, JEONG Y R, YUN J, et al. Stretchable array of highly sensitive pressure sensors consisting of polyaniline nanofibers and Au-coated polydimethylsiloxane micropillars[J]. ACS Nano, 2015, 9(10): 9974-9985. [13]CHOONG C, SHIM M, LEE B, et al. Highly stretchable resistive pressure sensors using a conductive elastomeric composite on a micropyramid array[J]. Advanced Materials, 2014, 26(21): 3451-3458. [14]GUO S Z, QIU K, MENG F, et al. 3D printed stretchable tactile sensors[J]. Advanced Materials, 2017, 29(27): 1701218. [15]CHEN H, SU Z, SONG Y, et al. Omnidirectional bending and pressure sensor based on stretchable CNT-PU sponge[J]. Advanced Functional Materials, 2017, 27(3): 1604434. [16]HABIBI M, DARBARI S, RAJABALI S, et al. Fabrication of a graphene-based pressure sensor by utilising field emission behavior of carbon nanotubes[J]. Carbon, 2016, 96: 259-267. [17]TAO L Q, ZHANG K N, TIAN H, et al. Graphene-paper pressure sensor for detecting human motions[J]. ACS Nano, 2017, 11(9): 8790-8795. [18]LIN L, XIE Y, WANG S, et al. Triboelectric active sensor array for self-powered static and dynamic pressure detection and tactile imaging[J]. ACS Nano, 2013, 7(9): 8266-8274. [19]LEE Y, PARK J, CHO S, et al. Flexible ferroelectric sensors with ultrahigh pressure sensitivity and linear response over exceptionally broad pressure range[J]. ACS Nano, 2018, 12(4): 4045-4054. [20]PANG Y, ZHANG K, YANG Z, et al. Epidermis microstructure inspired graphene pressure sensor with random distributed spinosum for high sensitivity and large linearity[J]. ACS Nano, 2018, 12(3): 2346-2354. [21]WANG J, JIU J, NOGI M, et al. A highly sensitive and flexible pressure sensor with electrodes and elastomeric interlayer containing silver nanowires[J]. Nanoscale, 2015, 7(7): 2926-2932. [22]WU W, WEN X, WANG Z L. Taxel-addressable matrix of vertical-nanowire piezotronic transistors for active and adaptive tactile imaging[J]. Science, 2013, 340(6135): 952-957. |
| [1] | 胡超1,2,艾国祥1,庞峰1,2,李圣明1,马利华1. 一种提高电子罗盘航向和姿态测量精度的新方法[J]. 上海交通大学学报(自然版), 2015, 49(02): 158-163. |
| [2] | 邱赓, 李鑫, 戎蒙恬, 刘涛. 基于最大误差的热传感器数量分配方法[J]. 上海交通大学学报(自然版), 2013, 47(04): 626-629. |
| [3] | 虞启凯1, 2, 游有鹏1, 韩江义3. 集成三维力传感器的微夹持器设计与试验 [J]. 上海交通大学学报(自然版), 2012, 46(06): 972-976. |
| [4] | 王文君, 刘武, 张卫平, 陈文元, 杨春生, 崔峰, 吴校生. 柔性微热剪切应力传感器阵列 [J]. 上海交通大学学报(自然版), 2012, 46(06): 984-988. |
| [5] | 韩韬,吉小军,李平,文玉梅,施文康. 声表面波无线无源传感器[J]. 上海交通大学学报, 2018, 52(10): 1314-1323. |
| [6] | 张建军1,刘卫东1,张溢文2,汤伟江1,2. 基于微机电系统的水下灵巧手触觉力测量传感器[J]. 上海交通大学学报, 2018, 52(1): 76-82. |
| 阅读次数 | ||||||
|
全文 |
|
|||||
|
摘要 |
|
|||||