上海交通大学学报(自然版) ›› 2016, Vol. 50 ›› Issue (05): 647-653.
• 机械仪表工程 • 下一篇
张洁1,潘聪1,孙寅斌1,吴立辉2,秦威1
收稿日期:
2015-07-22
出版日期:
2016-05-28
发布日期:
2016-05-28
基金资助:
ZHANG Jie1,PAN Cong1,SUN Yinbin1,WU Lihui2,QIN Wei1
Received:
2015-07-22
Online:
2016-05-28
Published:
2016-05-28
摘要: 摘要: 为了满足晶圆制造Interbay物料运输调度的多目标和实时性要求,提出了一种基于改进匈牙利算法和模糊逻辑控制的智能调度方法.首先对晶圆工件的运输时间、等待时间、交货期以及加工特性这4个参数进行加权求和,建立晶圆工件的多目标运输成本模型;然后基于模糊逻辑控制的权重参数调节模型对各个权重参数进行动态调整,进而实时地计算晶圆工件的运输成本;最后以最小化运输成本为目标,采用改进匈牙利算法求取晶圆工件和运输小车的最优匹配方案.仿真实验结果表明,与传统的几种单一启发式规则比较,提出的调度方法能够有效减少晶圆工件的平均搬运时间和平均加工周期,具有较好的综合调度性能.
中图分类号:
张洁1,潘聪1,孙寅斌1,吴立辉2,秦威1. 基于改进匈牙利算法和模糊逻辑控制的Interbay物料运输系统调度方法[J]. 上海交通大学学报(自然版), 2016, 50(05): 647-653.
ZHANG Jie1,PAN Cong1,SUN Yinbin1,WU Lihui2,QIN Wei1. Modified Hungarian Algorithm and Fuzzy Logic ControlBased Scheduling Method for Interbay Material Handling System [J]. Journal of Shanghai Jiaotong University, 2016, 50(05): 647-653.
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