上海交通大学学报

上海交通大学学报（自然版）

• 一般工业技术 • 上一篇    下一篇

NiTi薄膜对压电陶瓷材料阻尼性能的影响

卢雪梅，刘庆锁，何烜坤，张玉娇   

  1. （天津理工大学 材料工程学院, 天津 300384）
  • 收稿日期:2009-05-09 修回日期:1900-01-01 出版日期:2010-05-31 发布日期:2010-05-31

The Damping Capacities Effect on NiTi Film to PZT Material

LU Xuemei,LIU Qingsuo,HE Xuankun,ZHANG Yujiao   

  1. (School of Materials Science and Engineering, Tianjin University of Technology, Tianjin 300384， China)
  • Received:2009-05-09 Revised:1900-01-01 Online:2010-05-31 Published:2010-05-31

摘要： 采用磁控溅射法在压电陶瓷（PZT）基体上沉积形状记忆合金NiTi薄膜，经过600 °C晶化而制备出PZT/NiTi异质复合阻尼材料，采用X射线衍射仪和扫描电子显微镜等观察分析复合阻尼材料的物相组成及异质间的结合状态，并用相位法评价复合材料的阻尼性能.结果表明，PZT/NiTi异质复合阻尼材料的阻尼性能与PZT类似，但在频率为1.1~1.2 kHz时，其内耗曲线中出现了一个稳定平台.

关键词: 压电陶瓷, 形状记忆合金, 复合材料, 相位法, 阻尼性能

Abstract: PZT/NiTi composites were prepared by the method of depositing NiTi films on the PZT substrates by magnetron sputtering method. The phase structure and heterostructure of the composites were examined by using X-ray diffraction (XRD) and scanning electron microscope (SEM). A phase method was utilized to research on the damping capacities of PZT/NiTi composites. The results show that the change of damping capacities of PZT/NiTi composites is consistent with PZT, besides appearing a fancy platform about damping value.

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