[1] |
LI G B, WU X S, CHEN W Y. Design of digital detection circuit for piezoelectric gyroscope based on FPGA[J]. Transducer and Microsystem Technologies, 2016,35(9): 92-94 (in Chinese).
|
[2] |
CHOI G B. Design of piezoelectric gyro-sensor using lanthanum gallium silicate (La3Ga5SiO14) and temperature behavior of langasite [D]. New Jersey, USA:Department of Civil and Environmental Engineering,the State University of New Jersey, 2016.
|
[3] |
GOLESTANYAN E. Array of piezoelectric wires in acoustic energy harvesting [D]. Texas, USA: Department of Mechanical Engineering, Southern Methodist University, 2015.
|
[4] |
PALIWAL N, MUKHIJA N, BHATIA D. Design and optimization of high quality factor MEMS piezoelectric resonator with pseudo electrodes [C]//Proceedings of the 2015 4th International Conference on Reliability.Noida, India: IEEE, 2015: 1-5.
|
[5] |
ZHU H S, LEE J E Y. Design of phononic crystal tethers for frequency-selective quality factor enhancement in AlN piezoelectric-on-silicon resonators [J]. Procedia Engineering, 2015, 120: 516-519.
|
[6] |
HUNG LW. High-Q low-impedance MEMS resonators [D]. Berkeley, USA: School of Electrical Engineering and Computer Sciences, University of California at Berkeley, 2011.
|
[7] |
ABDOLVAND R. Thin-film piezoelectric-on-substrate resonators and narrowband filters [D]. Georgia, USA:School of Electrical and Computer Engineering, Georgia Institute of Technology, 2008.
|
[8] |
CALHOUN P J. Frequency synthesis using MEMS piezoelectric resonators [D]. Massachusetts, USA:Department of Aeronautics and Astronautics,Massachusetts Institute of Technology, 2004.
|
[9] |
WU X S, CHEN W Y, ZHANG W P, et al. Modeling analysis of piezoelectric micromachined modal gyroscope (PMMG) [C]//Proceedings of the 2009 4th IEEE International Conference on Nano Micro Engineered and Molecular Systems. Shenzhen, China: IEEE, 2009:304-309.
|
[10] |
BLOCK S T, JIANG X N, CUI C, et al. A 100 nW CMOS wake-up receiver with ?60 dBm sensitivity using AlN high-Q piezoelectric resonators[C]//Proceedings of the 2017 IEEE International Symposium on Circuits and Systems (ISCAS). Davis, USA:IEEE, 2017: 1-4.
|
[11] |
TOLEDO J, MANZANEQUE T, RUIZ-D′IEZ V, et al.Comparison of in-plane and out-of-plane piezoelectric microresonators for real-time monitoring of engine oil contamination with diesel [J]. Microsystem Technologies,2016, 22(7): 1781-1790.
|
[12] |
TAN W S, FANG G W, PILLAI G, et al. Fabrication and characterization of lithium-niobate thin film MEMS piezoelectric resonators [C]/Proceedings of the 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems(NEMS). Matsushima, Japan: IEEE, 2016: 516-519.
|
[13] |
ELSAYED M Y, NABKI F. Piezoelectric bulk mode disk resonator post-processed for enhanced quality factor performance [J]. Journal of Microelectromechanical Systems, 2016, 26(1): 75-83.
|
[14] |
TU C, LEE J E Y. Enhancing quality factor by etch holes in piezoelectric-on-silicon lateral mode resonators[J]. Sensors and Actuators A: Physical, 2017, 259:144-151.
|
[15] |
TU C, LEE J E Y. Boosting the quality factor of low impedance VHF piezoelectric-on-silicon lateral mode resonators using etch holes [J]. Procedia Engineering,2016, 168: 1261-1264.
|