Surface Acoustic Wave Based Wireless and Passive Sensors

doi:10.16183/j.cnki.jsjtu.2018.10.021

Abstract

Abstract: Surface acoustic wave (SAW) sensors endowed with the unique advantage of truly passive and naturally wireless operating principle attract much attentions in some applications, such as Internet-of-Things, smart grid, smart cities, and so forth. Some research results in SJTU on the fundamental theory of SAW, precise modeling of SAW sensors, design of wireless interrogation system, the sensing information acquisition and signal processing algorithm in the past 20 years have been summarized. The wireless SAW temperature sensor applications in the temperature monitoring of the breaker contacts of a switchgear, the cable joints in ring main units, and the oil temperature and level of power distribution transformers have been presented. Additionally, the wireless SAW sensor withstanding high temperature environment has been developed and applied in temperature monitoring of the high-frequency induction-heated cells in aluminium smelting.

Key words: surface acoustic wave (SAW), wireless and passive, sensors, intelligent distribution grid, high temperature resistance

CLC Number:

TP 212.2

HAN Tao,JI Xiaojun,LI Ping,WEN Yumei,SHI Wenkang. Surface Acoustic Wave Based Wireless and Passive Sensors[J]. Journal of Shanghai Jiao Tong University, 2018, 52(10): 1314-1323.

References

［1］LALJER C E. Joint Chemical Agent Detector (JCAD): The future of chemical agent detection［J］. Proceedings of SPIE-The International Society for Optical Engineering, 2003, 4722: 41-49. ［2］BAO X Q, BURKHARD W, VARADAN V V, et al. SAW temperature sensor and remote reading system［C］//IEEE 1987 Ultrasonics Symposium. IEEE. 1987: 583-586. ［3］POHL A. Review of wireless SAW sensors［J］. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2000, 47(2): 317-332. ［4］REINDL L M, SHRENA I M. Wireless measurement of temperature using surface acoustic waves sensors［C］//IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2004, 51: 1457-1463. ［5］FRIEDT J M, DROIT C, BALLANDRAS S, et al．Remote vibration measurement: a wireless passive surface acoustic wave resonator fast probing strategy［J］. Review of Scientific Instruments, 2012, 83(5): 055001. ［6］KUYPERS J, REINDL L, TANAKA S, et al. Ma-ximum accuracy evaluation scheme for wireless SAW delay-line sensors［J］. IEEE Transactions on Ultraso-nics, Ferroelectrics, and Frequency Control, 2008, 55(7): 1640-1652. ［7］CUNHA D, MOONLIGHT T, LAD R, et al. High temperature sensing technology for applications up to 1000 ℃［C］//2008 IEEE conference on sensors, 2008: 752-755. ［8］PENG Z. High temperature langasite surface acoustic wave sensors［D］. Carnegie Mellon University, 2011. ［9］TIERSTEN H F. Perturbation theory for linear electroelastic equations for small fields superposed on a bias［J］. Journal of Acoustical Society of America, 1978, 64(3): 832-837. ［10］吉小军. 高温偏载条件下的声表面波压力传感器理论研究［D］. 上海: 上海交通大学, 2004. JI Xiaojun. Theoretical study on SAW pressure sensor under high temperature and partial load condition［D］. Shanghai: Shanghai Jiao Tong University, 2004. ［11］JI X J, HAN T, SHI W K. Investigation on SAW properties of LGS and optimal cuts for high-temperature applications［J］. IEEE Transactions on Ultraso-nics, Ferroelectrics, and Frequency Control, 2005, 52(11): 2075-2080. ［12］HAN T, JI X J, SHI W K. Optimal pressure-sensitive cuts for surface acoustic waves on langasite［J］. Science in China, 2006, 49(2): 254-261. ［13］KANG A L, LIN J Q, JI X J, et al. A high sensiti-vity pressure sensor based on surface transverse wave［J］. Sensors and Actuators A: Physcis, 2012, 187: 141-146. ［14］JI X J, FAN Y P, CHEN J, et al. Passive wireless torque sensor based on surface transverse wave［J］. IEEE Sensors Journal, 2016, 16(4): 888-894. ［15］ZHANG Q Z, HAN T, TANG G B, et al. SAW characteristics of AlN/SiO2/3C-SiC layered structure with embedded electrodes［J］. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2016, 63(10): 1608-1612. ［16］DIXON B, KALININ V. A Second generation in-car tire pressure monitoring system based on wireless passive SAW sensors［C］//2006 IEEE International Frequency Control Symposium and Exposition, 2006: 374-380. ［17］DIOGO S, JOANA C M, ANTNIO B P, et al. Measuring torque and temperature in a rotating shaft using commercial SAW sensors［J］. Sensors, 2017, 17(7): 1547. ［18］SAUVAGE G. Phase noise in oscillators: A mathematical analysis of Leeson’s model［J］. Instrumentation and Measurement, IEEE Transactions on, 1977, 26(4): 408-410. ［19］陈宁, 费元春. 高速数据采集系统中的孔径抖动［J］. 北京理工大学学报, 2003, 23(2): 234-237. CHEN Ning, FEI Yuanchun. Effects of aperture jitter to the signal noice ration in high speed data acquisition systems［J］. Journal of Beijing Institute of Technology, 2003, 23(2): 234-237. ［20］YAO Y X, PANDIT S M. Cramér-Rao lower bounds for a damped sinusoidal process［J］. Signal Processing, IEEE Transactions on, 1995, 43(4): 878-885. ［21］HAN T, ZHANG C R, HU Y, et al. Recent research results on wireless passive acoustic sensors and their applications［C］//2016 IEEE Ultrasonics Symposium, 2016: 1-5. ［22］LIU B Q, ZHANG C R, JI X J, et al. A performance improved frequency estimation algorithm for passive wireless SAW resonant sensors［J］. Sensors, 2014, 13: 18545-18555. ［23］KALININ V. Comparison of frequency estimators for interrogation of wireless resonant SAW sensors［C］//2015 IEEE International Frequency Control Symposium & the European Frequency and Time Forum, 2015: 498-503. ［24］LIU B Q, HAN T, ZHANG C R. Error correction method for passive and wireless resonant SAW temperature sensor［J］. IEEE Sensors Journal, 2015, 15(6): 3608-3614. ［25］薛明喜, 杨扬, 张晨睿, 等. 基于自适应Kalman滤波的SAW测温数据纠错方法［J］. 仪器仪表学报, 2016, 37(12): 2766-2773. XUE Mingxi, YANG Yang, ZHANG Chenrui, et al. Error correction method for SAW temperature measurement data based on adaptive Kalman filter［J］. Chinese Journal of Scientific Instrument, 2016, 37(12): 2766-2773. ［26］LIN J M, WANG N, CHEN H, et al. Fast, precise, and full extraction of the COM parameters for multielectrode-type gratings by periodic Green’s function method［J］. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2002, 49(12): 1735-1738.

[1]	HAN Qingyuan. A Review of Current Status of Environmental Perception Technology for Port Automatic Freight Transportation [J]. Ocean Engineering Equipment and Technology, 2025, 12(1): 79-86.
[2]	LI Jihao1, LIN Guanying2, WANG Nuansheng3, LI Yang3, LI Junyang1. Overview of the Development of Flexible Ocean CTD Sensors [J]. Ocean Engineering Equipment and Technology, 2024, 11(3): 69-77.
[3]	XUE Weipeng (薛炜彭), WU Minghu (吴明虎), WANG Lin∗ (王琳). Spatial Temporal Correlation 3D Vehicle Detection and Tracking System with Multiple Surveillance Cameras [J]. J Shanghai Jiaotong Univ Sci, 2023, 28(1): 52-60.
[4]	LÜ Runyan (吕润妍), PENG Na (彭娜), WU Yi (吴怡), CAI Yunze∗ (蔡云泽). Improved Spatial Registration Algorithm for Sensors on Multiple Mobile Platforms [J]. J Shanghai Jiaotong Univ Sci, 2022, 27(5): 638-648.
[5]	WANG Chaoran (王超然), BAO Qilian (鲍其莲), ZHENG Xunjiang (郑循江), SUN Shuodong (孙朔冬). Research on Motion Estimation Algorithm of Star Point Based on Nonlinear Gaussian Fitting [J]. Journal of Shanghai Jiao Tong University (Science), 2018, 23(4): 562-.
[6]	CUI Daxiang. Gastric Cancer Prewarning and Early Theranostics System Based on Nanotechnology [J]. Journal of Shanghai Jiao Tong University, 2018, 52(10): 1396-1403.
[7]	SUN Ling (孙玲). A Real-Time Collision-Free Path Planning of a Rust Removal Robot Using an Improved Neural Network [J]. Journal of shanghai Jiaotong University (Science), 2017, 22(5): 633-640.
[8]	XU Gongguo1* (徐公国), DUAN Xiusheng1 (段修生), LU Hao2 (吕豪). Target Priority Determination Methods by Interval-Valued Intuitionistic Fuzzy Sets with Unknown Attribute Weights [J]. Journal of shanghai Jiaotong University (Science), 2017, 22(5): 624-632.
[9]	LI Xin* (李鑫), ZHOU Wei (周巍), JIANG Wen (蒋雯). Rigid Sensor Allocation and Placement Technique for Reducing the Number of Sensors in Thermal Monitoring [J]. Journal of shanghai Jiaotong University (Science), 2017, 22(4): 481-492.
[10]	FAN Yanping,JI Xiaojun,CAI Ping. Designing of a Fast Demodulation Method for Surface Acoustic Wave Torque Sensor [J]. Journal of Shanghai Jiaotong University, 2015, 49(08): 1096-1100.
[11]	WANG Ruo-lin (王若琳), LI Xin (李鑫), LIU Wen-jiang (刘文江), LIU Tao* (刘涛), RONG Meng-tian (戎蒙恬), ZHOU Liang (周亮). Surface Spline Interpolation Method for Thermal Reconstruction with Limited Sensor Data of Non-Uniform Placements [J]. Journal of shanghai Jiaotong University (Science), 2014, 19(1): 65-71.