Preventive Maintenance Policy of Cluster Tools Based on Markov Process

Abstract

Abstract:

Abstract： In order to ensure the reliability of cluster tools in semiconductor wafer fabrications, a Markov processbased preventive maintenance policy was presented considering the economical efficiency. First, a state transfer model was established by applying the method of combining major maintenance and minimal maintenance, taking into account the random failure and degradation failure modes. Then, the steadystate probability for each state and transition probabilities among states were calculated based on the Markov theory. After that, the optimal maintenance policy was obtained through the policy iteration algorithm and the Markov decision theory. Finally，numerous experiments were conducted. The results indicate that the proposed preventive maintenance policy is effective and feasible.

Key words: preventive maintenance, Markov process, Markov process decision, random failure, deterioration failure

CLC Number:

TP 29

QI Faqun,ZHOU Binghai. Preventive Maintenance Policy of Cluster Tools Based on Markov Process[J]. Journal of Shanghai Jiaotong University, 2014, 48(10): 1461-1467.

References

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