Abstract: MPTS/MPTES selfassembled film was fabricated on singlecrystal silicon substrates by molecular selfassembly process. Atomic force microscope (AFM), Xray photoelectron spectrometry (XPS) and contact angle measurer were used to characterize the thin films. The tribological properties of the films sliding against GCr15 steel ball were evaluated on a DFPM reciprocating friction and wear tester. The results show that the MPTS/MPTES film has excellent hydrophobic and friction and wear behavior properties compared with MPTS film and MPTES film. The cause is that the MPTS/MPTES film has big size molecule which can endow some fluidity and flexibility to the film and closepacked molecules or radicals on the bottom are rigid which can bear certain load.