Abstract: Aiming at the problems of the existent micro-mirror driving, a non-contact micro-mirror translational mechanism based on PLZT（lanthanum-doped lead zirconate titannate）/PVDF（polyvinylidene fluoride） driving was presented. First, according to the functional components of the translational mechanism of the non-contact micro-mirror, the overall design scheme is determined. Then the theoretical analysis and design calculation are carried out, and the size parameters are determined. At last, the finite element analysis of the displacement, stress of the mechanism are carried out. The analysis results show that the calculated results are in good consistency with the simulation results, and the rationality and feasibility of this translational mechanism are verified. The PLZT/PVDF driving micro-mirror translational mechanism can realize two-dimensional motion and control the displacement of micro-mirror precisely and effectively, and it has the advantages of fast response speed, non-contact, remote control and no electromagnetic interference, etc. Furthermore, the PLZT/PVDF driving translational mechanism can be used in independent working environment.

Key words: PLZT（lanthanum-doped lead zirconate titannate）/PVDF（polyvinylidene fluoride） driving, micro-mirror translational mechanism, micro-driven, non-contact control