Synergy Effect of Nonionic Surfactant and Ultrasonic on the 
Post-Cleaning of Aluminium Alloy Chemical Mechanical Polishing

doi:10.16183/j.cnki.jsjtu.2018.05.012

Abstract

Abstract: This paper studied two cleaning methods comprising of dipping and ultrasonic for 7003 aluminium alloy after chemical mechanical polishing (CMP). A series of experiments were carried out to investigate the effect of octyl phenyl polyoxyethylene ether (TX-100) on the removal of SiO2 particles in post CMP cleaning process of Al alloy. The surface morphology and roughness after cleaning were characterized by atomic force microscope (AFM). It was found that the increase in TX-100 concentration leads to the initially decrease in abrasive particle diameter, Zeta potential and contact angle, followed by an increase trend with the further increase in TX-100 concentration. Combining with ultrasonic and TX-100, the removal ratio of SiO2 particles could be enhanced from 57% to 90%, and the surface roughness decreases to 2.16 nm after cleaning.

Key words: aluminium alloy, chemical mechanical polishing (CMP), cleaning, ultrasonic

CLC Number:

TG 175

WANG Yongguang1, WU Zhonghua2,ZHAO Yongwu2,CHEN Yao1,LIU Ping2,LU Xiaolong1,ZHU Yuguang1. Synergy Effect of Nonionic Surfactant and Ultrasonic on the Post-Cleaning of Aluminium Alloy Chemical Mechanical Polishing[J]. Journal of Shanghai Jiaotong University, 2018, 52(5): 582-586.

References

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Synergy Effect of Nonionic Surfactant and Ultrasonic on the Post-Cleaning of Aluminium Alloy Chemical Mechanical Polishing

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