Journal of Shanghai Jiao Tong University
Synergy Effect of Nonionic Surfactant and Ultrasonic on the Post-Cleaning of Aluminium Alloy Chemical Mechanical Polishing
WANG Yongguang1, WU Zhonghua2,ZHAO Yongwu2,CHEN Yao1,LIU Ping2,LU Xiaolong1,ZHU Yuguang1
Journal of Shanghai Jiaotong University . 2018, (5): 582 -586 .  DOI: 10.16183/j.cnki.jsjtu.2018.05.012