Tactile Force Sensor of Underwater Dexterous Hand Based on Micro Electromechanical System

doi:10.16183/j.cnki.jsjtu.2018.01.012

Abstract

Abstract: In order to achieve the position determination and force tactile perception in underwater dexterous hand grasping target under deep water environment, an array of tactile force measurement sensor is designed. The silicon cup is used as the force sensitive core, the tactile force measurement of the static pressure vector superposition of water is realized by the capsule differential pressure structure, and the influence of the static pressure of water on the tactile force measurement is eliminated. The analytical solution for the deformation and stress of silicon cup square bottom is analyzed by the elastic mechanics and shell theory. The results show that the tactile force sensor of underwater dexterous hand achieves the tactile perception and position determination of the target gripping. The capsule differential pressure structure makes the tactile force sensor eliminate the effect of the static pressure. The silicon cup measurement structure has the advantages of high sensitivity, small error, and high output characteristics of stress.

Key words: underwater dexterous hand, tactile force measurement, pressure compensation, piezoresistive sensor, silicon cup

CLC Number:

TP 212

ZHANG Jianjun1,LIU Weidong1,ZHANG Yiwen2,TANG Weijiang1,2. Tactile Force Sensor of Underwater Dexterous Hand Based on Micro Electromechanical System[J]. Journal of Shanghai Jiaotong University, 2018, 52(1): 76-82.

References

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