声表面波无线无源传感器

doi:10.16183/j.cnki.jsjtu.2018.10.021

摘要/Abstract

摘要： 无线无源赋予声表面波(Surface Acoustic Wave, SAW)传感器的显著特点使其在物联网、智能电网、智慧城市等领域日益受到关注.综述了上海交通大学在SAW基础理论、器件精确仿真分析建模、传感器无线阅读装置设计、信息获取及处理算法以及应用等方面的研究成果，详细介绍了面向智能化配网中压开关柜动静触头温度、环网柜电缆终端头温度以及配网变压器油温/油位监测的声表面波无线无源温度传感器研发与应用情况，同时介绍了耐高温声表面波无线无源传感器研发进展以及在炼铝电解槽温度监控中的应用.

关键词: 声表面波, 无线无源, 传感器, 智能化配网, 耐高温

Abstract: Surface acoustic wave (SAW) sensors endowed with the unique advantage of truly passive and naturally wireless operating principle attract much attentions in some applications, such as Internet-of-Things, smart grid, smart cities, and so forth. Some research results in SJTU on the fundamental theory of SAW, precise modeling of SAW sensors, design of wireless interrogation system, the sensing information acquisition and signal processing algorithm in the past 20 years have been summarized. The wireless SAW temperature sensor applications in the temperature monitoring of the breaker contacts of a switchgear, the cable joints in ring main units, and the oil temperature and level of power distribution transformers have been presented. Additionally, the wireless SAW sensor withstanding high temperature environment has been developed and applied in temperature monitoring of the high-frequency induction-heated cells in aluminium smelting.

Key words: surface acoustic wave (SAW), wireless and passive, sensors, intelligent distribution grid, high temperature resistance

中图分类号:

TP 212.2

韩韬，吉小军，李平，文玉梅，施文康. 声表面波无线无源传感器[J]. 上海交通大学学报（自然版）, 2018, 52(10): 1314-1323.

HAN Tao,JI Xiaojun,LI Ping,WEN Yumei,SHI Wenkang. Surface Acoustic Wave Based Wireless and Passive Sensors[J]. Journal of Shanghai Jiaotong University, 2018, 52(10): 1314-1323.

参考文献

［1］LALJER C E. Joint Chemical Agent Detector (JCAD): The future of chemical agent detection［J］. Proceedings of SPIE-The International Society for Optical Engineering, 2003, 4722: 41-49. ［2］BAO X Q, BURKHARD W, VARADAN V V, et al. SAW temperature sensor and remote reading system［C］//IEEE 1987 Ultrasonics Symposium. IEEE. 1987: 583-586. ［3］POHL A. Review of wireless SAW sensors［J］. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2000, 47(2): 317-332. ［4］REINDL L M, SHRENA I M. Wireless measurement of temperature using surface acoustic waves sensors［C］//IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2004, 51: 1457-1463. ［5］FRIEDT J M, DROIT C, BALLANDRAS S, et al．Remote vibration measurement: a wireless passive surface acoustic wave resonator fast probing strategy［J］. Review of Scientific Instruments, 2012, 83(5): 055001. ［6］KUYPERS J, REINDL L, TANAKA S, et al. Ma-ximum accuracy evaluation scheme for wireless SAW delay-line sensors［J］. IEEE Transactions on Ultraso-nics, Ferroelectrics, and Frequency Control, 2008, 55(7): 1640-1652. ［7］CUNHA D, MOONLIGHT T, LAD R, et al. High temperature sensing technology for applications up to 1000 ℃［C］//2008 IEEE conference on sensors, 2008: 752-755. ［8］PENG Z. High temperature langasite surface acoustic wave sensors［D］. Carnegie Mellon University, 2011. ［9］TIERSTEN H F. Perturbation theory for linear electroelastic equations for small fields superposed on a bias［J］. Journal of Acoustical Society of America, 1978, 64(3): 832-837. ［10］吉小军. 高温偏载条件下的声表面波压力传感器理论研究［D］. 上海: 上海交通大学, 2004. JI Xiaojun. Theoretical study on SAW pressure sensor under high temperature and partial load condition［D］. Shanghai: Shanghai Jiao Tong University, 2004. ［11］JI X J, HAN T, SHI W K. Investigation on SAW properties of LGS and optimal cuts for high-temperature applications［J］. IEEE Transactions on Ultraso-nics, Ferroelectrics, and Frequency Control, 2005, 52(11): 2075-2080. ［12］HAN T, JI X J, SHI W K. Optimal pressure-sensitive cuts for surface acoustic waves on langasite［J］. Science in China, 2006, 49(2): 254-261. ［13］KANG A L, LIN J Q, JI X J, et al. A high sensiti-vity pressure sensor based on surface transverse wave［J］. Sensors and Actuators A: Physcis, 2012, 187: 141-146. ［14］JI X J, FAN Y P, CHEN J, et al. Passive wireless torque sensor based on surface transverse wave［J］. IEEE Sensors Journal, 2016, 16(4): 888-894. ［15］ZHANG Q Z, HAN T, TANG G B, et al. SAW characteristics of AlN/SiO2/3C-SiC layered structure with embedded electrodes［J］. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2016, 63(10): 1608-1612. ［16］DIXON B, KALININ V. A Second generation in-car tire pressure monitoring system based on wireless passive SAW sensors［C］//2006 IEEE International Frequency Control Symposium and Exposition, 2006: 374-380. ［17］DIOGO S, JOANA C M, ANTNIO B P, et al. Measuring torque and temperature in a rotating shaft using commercial SAW sensors［J］. Sensors, 2017, 17(7): 1547. ［18］SAUVAGE G. Phase noise in oscillators: A mathematical analysis of Leeson’s model［J］. Instrumentation and Measurement, IEEE Transactions on, 1977, 26(4): 408-410. ［19］陈宁, 费元春. 高速数据采集系统中的孔径抖动［J］. 北京理工大学学报, 2003, 23(2): 234-237. CHEN Ning, FEI Yuanchun. Effects of aperture jitter to the signal noice ration in high speed data acquisition systems［J］. Journal of Beijing Institute of Technology, 2003, 23(2): 234-237. ［20］YAO Y X, PANDIT S M. Cramér-Rao lower bounds for a damped sinusoidal process［J］. Signal Processing, IEEE Transactions on, 1995, 43(4): 878-885. ［21］HAN T, ZHANG C R, HU Y, et al. Recent research results on wireless passive acoustic sensors and their applications［C］//2016 IEEE Ultrasonics Symposium, 2016: 1-5. ［22］LIU B Q, ZHANG C R, JI X J, et al. A performance improved frequency estimation algorithm for passive wireless SAW resonant sensors［J］. Sensors, 2014, 13: 18545-18555. ［23］KALININ V. Comparison of frequency estimators for interrogation of wireless resonant SAW sensors［C］//2015 IEEE International Frequency Control Symposium & the European Frequency and Time Forum, 2015: 498-503. ［24］LIU B Q, HAN T, ZHANG C R. Error correction method for passive and wireless resonant SAW temperature sensor［J］. IEEE Sensors Journal, 2015, 15(6): 3608-3614. ［25］薛明喜, 杨扬, 张晨睿, 等. 基于自适应Kalman滤波的SAW测温数据纠错方法［J］. 仪器仪表学报, 2016, 37(12): 2766-2773. XUE Mingxi, YANG Yang, ZHANG Chenrui, et al. Error correction method for SAW temperature measurement data based on adaptive Kalman filter［J］. Chinese Journal of Scientific Instrument, 2016, 37(12): 2766-2773. ［26］LIN J M, WANG N, CHEN H, et al. Fast, precise, and full extraction of the COM parameters for multielectrode-type gratings by periodic Green’s function method［J］. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2002, 49(12): 1735-1738.

[1]	李晗, 张波涛, 王俊杰, 孙运达, 龚圣捷. 光纤光栅传感器振动与温度信号解耦[J]. 上海交通大学学报, 2022, 56(2): 214-222.
[2]	邱忠宇, 赵文龙, 高文, 潘洪涛, 史冉东. 动态视觉传感器的目标检测算法对比分析[J]. 空天防御, 2021, 4(4): 101-106.
[3]	谢子仪, 段力, 翁昊天. 大藤峡人字闸门智能监控微机电系统传感器[J]. 上海交通大学学报, 2021, 55(11): 1401-1407.
[4]	鲁姗，王志武，颜国正，周泽润. 仿生人工肛门括约肌假体的机构设计和实验验证[J]. 上海交通大学学报, 2019, 53(10): 1151-1158.
[5]	王可竹, 朱代兴. 铁钻工钻杆作业界面自动判定系统[J]. 海洋工程装备与技术, 2018, 5(6): 405-409.
[6]	崔大祥. 基于纳米技术的胃癌预警与早期诊疗系统[J]. 上海交通大学学报（自然版）, 2018, 52(10): 1396-1403.
[7]	张建军1，刘卫东1，张溢文2，汤伟江1,2. 基于微机电系统的水下灵巧手触觉力测量传感器[J]. 上海交通大学学报（自然版）, 2018, 52(1): 76-82.
[8]	张颖，乔运龙,张海洋. 基于虚拟力和果蝇优化算法混合控制水声传感器网络部署策略[J]. 上海交通大学学报（自然版）, 2017, 51(6): 715-721.
[9]	弓鹏伟1，费燕琼1,3，宋立博2. 基于多传感器信息融合的轮履混合移动机器人路况识别方法[J]. 上海交通大学学报（自然版）, 2017, 51(4): 398-.
[10]	刘清友, 毛良杰, 周守为, 王国荣, 黄鑫, 付强, 刘正礼. 基于光纤光栅测试技术的隔水管力学行为实验研究[J]. 海洋工程装备与技术, 2015, 2(6): 378-383.
[11]	范彦平,吉小军,蔡萍. 一种声表面波转矩传感器快速解调方法设计[J]. 上海交通大学学报（自然版）, 2015, 49(08): 1096-1100.
[12]	王秀青1，侯增广2，曾慧3，吕锋1，潘世英1. 基于多传感器信息融合的机器人故障诊断[J]. 上海交通大学学报（自然版）, 2015, 49(06): 793-798.
[13]	张树，刘大明，刘胜道，张华，田东. 基于磁场能量密度梯度的磁源定位技术[J]. 上海交通大学学报（自然版）, 2015, 49(04): 424-428.
[14]	乐健，张华，叶艳辉，范宇. 基于旋转电弧传感机器人立焊焊缝的跟踪[J]. 上海交通大学学报（自然版）, 2015, 49(03): 348-352.
[15]	张宗郁1，高洪明1，韩庆璘1，黄锐2，荣建2，王勇超2. 飞机导管机器人焊接手眼关系标定[J]. 上海交通大学学报（自然版）, 2015, 49(03): 392-394.