上海交通大学学报

上海交通大学学报（自然版） ›› 2012, Vol. 46 ›› Issue (06): 984-988.

• 自动化技术、计算机技术 • 上一篇    下一篇

柔性微热剪切应力传感器阵列

王文君，刘武，张卫平，陈文元，杨春生，崔峰，吴校生   

  1. (上海交通大学 微米/纳米加工技术重点实验室； 微纳科学技术研究院， 上海 200240)
  • 收稿日期:2011-09-06 出版日期:2012-06-28 发布日期:2012-06-28

Flexible Micro Thermal Shear Stress Sensor Array

WANG  Wen-Jun, LIU  Wu, ZHANG  Wei-Ping, CHEN  Wen-Yuan, YANG  Chun-Sheng, CUI  Feng, WU  Xiao-Sheng   

  1. (Science and Technology on Micro/Nano Fabrication Laboratory, Research Institute of Micro/Nano Science and Technology; Shanghai Jiaotong University, Shanghai 200240, China)
  • Received:2011-09-06 Online:2012-06-28 Published:2012-06-28
  • Supported by:

    基金(9140A14010511JW0304)，微米/纳米加工技术重点实验室基金，教育部新世纪优秀人才支持计划(NCET 100583)资助

摘要： 设计了一种基于微机电系统的、制备在柔性聚酰亚胺衬底上的双热线结构微型热剪切应力传感器阵列，可用于复杂形状物体表面所受剪切应力的矢量化测量.基于传感器的原理，用Comsol软件对传感器进行了温度场和流场的仿真，说明了传感器制作工艺流程，用硅橡胶与聚酰亚胺在酒精中浸泡后易于剥离的特点实现柔性传感器脱膜.对传感器实物进行了温度电阻系数和响应频率的测试.实验结果表明，设计的工艺路线简单，结构参数合理，可以实现所需柔性传感器阵列.
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关键词: 热剪切应力, 微机电系统, 柔性传感器, 聚酰亚胺

Abstract: This paper presented a flexible micro thermal shear stress sensor array with double hot-line resistors, which can be used to detect the value and the direction of shear stress on complicated surface. Based on the principle of sensor, Comsol was used to simulate the temperature and flow field of the sensor. The process flowchart was designed. The release of polyimide from PDMS is easy after being soaked in alcohol. The sensor’s TCR and response frequency were tested. The experimental results show that the flowchart of process is simple and the parameters of structure are reasonable, it can achieve the required flexible sensor array.

Key words: thermal shear stress, micro electromechanical system （MEMS）, flexible sensor, polyimide

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