Abstract: To enhance the measurement precision of eddy current sensor in particular environments such as extreme temperature changes and limited available space in aerospace, we optimized the structural parameters of the traditional dual-coil eddy current sensor probe by electromagnetic field analysis and finite element simulation modeling, and further presented the criteria for determining the optimal coil distance of the dual-coil probe. The simulation results are verified by setting up an experimental platform. For the extreme temperature environment, the displacement measurement error caused by the full range temperature variation of the dual-coil sensor under the optimal distance is less than 21.0% of that of the single-coil sensor. On this basis, we analyzed and verified the thermal stability of the structurally optimized dual-coil eddy current sensor. After temperature compensation, the displacement measurement accuracy can reach 14.9 times more accurate than that of the single-coil sensor. The method proposed in this paper can provide a design reference for the structural optimization of the axial dual-coil eddy current sensor probe.

Key words: eddy current sensor, electromagnetic field analysis, finite element simulation, parameter optimization

摘要： 为了提高涡流传感器在极端温度变化和航空航天有限空间等特殊环境下的测量精度，通过电磁场分析和有限元仿真建模，对传统双线圈涡流传感器探头的结构参数进行了优化，并进一步提出了确定双线圈探头最优线圈距离的准则。通过搭建实验平台对仿真结果进行了验证。在极端温度环境下，双线圈传感器在最佳距离下的全范围温度变化引起的位移测量误差小于单线圈传感器的21.0%。在此基础上，对结构优化后的双线圈涡流传感器的热稳定性进行了分析和验证。经过温度补偿后，双线圈涡流传感器位移测量精度要比单线圈传感器的精确14.9倍。提出的方法可为轴向双线圈涡流传感器探头的结构优化提供设计参考。

关键词: 涡流传感器，电磁场分析，有限元仿真，参数优化