Theoretical Model and Dynamic Performance of V-Shaped Electrothermal Actuator

doi:10.16183/j.cnki.jsjtu.2020.216

Abstract

Abstract:

To study the dynamic performance of the V-shaped electrothermal actuator, electrothermal and thermoelastic coupling models are established based on the heat transfer theory and the forced vibration equation, respectively. A one dimensional multi-physical field coupling theoretical model of the V-shaped electrothermal actuator is proposed. The electrothermal coupling model is solved by the method in which the sine transformation and the implicit difference are combined together. Then, a convergence test is performed. The number of discrete points in the sine transformation has less influence on the temperature stability. The transient and static temperature distributions of the model coincide with that of the finite element method (FEM) at different voltages. The static displacements gained by the experiment and the edge detection algorithm also match well with that gained by the thermoelastic coupling model at different voltages. Based on the proposed model, the dynamic performances of the actuator at step and sine voltages are analyzed. The research results indicate that changes of temperature and displacement in the middle of the V-shaped electrothermal actuator are larger with the amplitude of sine voltage increasing. When the loading time of sine voltage is larger than 5 periods (50 ms), the average temperature and displacement in the middle of the actuator are equal to those with equivalent direct voltage. When applied to a periodic voltage, the motion of the actuator is also gradually cyclical and has the same time period with the voltage cycle.

Key words: electrothermal actuator, coupling, sine transformation, forced vibration, edge detection

CLC Number:

CHEN Hao, WANG Xinjie, WANG Jiong, XI Zhanwen, NIE Weirong. Theoretical Model and Dynamic Performance of V-Shaped Electrothermal Actuator[J]. Journal of Shanghai Jiao Tong University, 2021, 55(10): 1263-1271.

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参数	取值
L/μm	1500
b/μm	45
d/μm	100
θ₀/(°)	1
g/μm	10

参数	取值
c/(J·m^-1·K^-1)	787
κ/(W·m^-1·K^-1)	60
k_v/(W·m^-2·K^-1)	70
ρ/(Ω·m)	2.3×10^-4
α/K^-1	2.56×10^-6
E/GPa	169
μ	0.28