Abstract: By considering the smallest feature that can be observed by an optical microscope, the development of optical microscopy and the efforts made to break the diffraction limit were reviewed. Optical microscopy is crucial for science at small scales. Although the diffraction limit has been overcome, the continuous effort made in this field would enable a further improvement in resolution.

Key words: optical microscopy; diffraction limit; super resolution; superlens; superoscillation

CLC Number: 

• O 766+.1

• TG 115.21+5.4

• Q-334

• O 439

• O 59