Abstract: APTES/rareearth composite film was fabricated on the singlecrystal silicon substrate by molecular selfassembly process. The structure of the composite films was characterized using ellipsometer, contact angle tester and Xray photoelectron spectroscopy (XPS).The adhesion and nanofriction properties of the composite films were investigated using atomic force microscope (AFM). The results indicate that APTES/RE film possesses a remarkable low friction coefficient and adhesion. Along with the increase of the scanning rate and load, the friction force between the probe and the film increases. The friction force and adhesion force increase with relative humidity increasing. APTES/RE composite film shows excellent antiadhesion property and wearresistance characteristic, indicating its promising applications in microelectromechanical system (MEMS) field.