Design of a Grooved Cross-Section Silicon Needle for Assisting Deep Implantation of Flexible Neural Probe

doi:10.16183/j.cnki.jsjtu.2020.341

Abstract

Abstract:

Aimed at the buckling problem of deep implantation of flexible neural probe, a grooved cross-section silicon needle is designed as an auxiliary implant tool to provide temporary stiffness for probe implantation. In order to quantitatively evaluate the comprehensive performance of auxiliary tools, combining critical buckling force and cross-section area, and considering mechanical and biological properties, the performance evaluation index of auxiliary tools is proposed. Based on this evaluation index, the optimal groove depth ratio and groove width ratio of the grooved cross-section silicon needle are studied. The best groove depth ratio is the maximum value within the process requirements while the best groove width ratio increases with the thickness of the silicon needle. Moreover, the performance evaluation index is used to quantitatively prove that the grooved cross-section silicon needle has obvious performance advantages over the traditional circular and rectangular cross-section silicon needles. The simulation design of the grooved cross-section silicon needle is conducive to screening the best parameter combination of the cross-section, reducing the number of processing and the cost of experiments.

Key words: flexible neural probe, implantation strategy, grooved cross-section, silicon needle

CLC Number:

R318.01
Q66

HE Yuxin, ZHANG Wenguang, XU Liyue, ZHOU Xuhui. Design of a Grooved Cross-Section Silicon Needle for Assisting Deep Implantation of Flexible Neural Probe[J]. Journal of Shanghai Jiao Tong University, 2022, 56(5): 648-655.

Figures/Tables 11

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h₁/μm	a/μm	b/μm	h₁/μm	h₂/μm	P	F_T/mN	F_A/mN
30	30	40	30	10	4.14	9.2	9.0
40	25	50	40	10	7.66	19.4	18.9
50	20	60	50	10	12.37	32.5	31.8
60	15	70	60	10	18.42	46.2	45.9
70	15	70	70	10	25.30	71.7	70.0

h₁/μm	P			T₁、T₂的平均优化率/%	P			T₃、T₄、T₅的平均优化率/%
h₁/μm	槽形截面	T₁	T₂	T₁、T₂的平均优化率/%	T₃	T₄	T₅	T₃、T₄、T₅的平均优化率/%
30	4.14	9.39	6.26	-47.09	3.26	2.10	3.91	33.98
40	7.66	9.09	10.67	-22.47	5.35	2.72	6.95	53.00
50	12.37	11.79	11.01	8.50	7.57	2.94	10.84	73.82
60	18.42	14.04	10.67	49.09	9.55	2.72	15.89	96.24
70	25.30	17.49	11.96	71.82	13.02	3.41	21.62	99.47