Piezoelectric Analysis and Testing of Valve-less Micropump

Abstract

Abstract:

A piezoelectric micropump model was proposed for microanalytical reagent by using a piezoelectric transducer as the driving force, a silicon substrate pump and polydinethylsiloxane polymeric membrane material. In order to achieve the maximum driving energy, the modals and driving frequency of the piezoelectric transducer was analyzed using finite element analysis (FEA). It was found out that the pump volumetric efficiency reached the maximum on the first order modal. The best frequency range was between 0 and 1 kHz according to piezoelectricstress coupling analysis. Finally, the micropump models were fabricated with the micro-system fabrication technology, and a performance testing was conducted. The result show that the flow rates reach the maximum value at 60 Hz and 200 Hz under sine driving signal, and the pressure head reaches the maximum value at 60 to 600 Hz, which conforms to the numerical analysis result. The maximum flow rate and pressure head is 34.5 μL/min and 657 Pa according to the experiment.

Key words: micropump, piezoelectric, modals, flow rate, pressure

CLC Number:

GUAN Yanfang1,GENG Tie1,HAN Lili1,LIU Chunbo1，LING Xing2. Piezoelectric Analysis and Testing of Valve-less Micropump[J]. Journal of Shanghai Jiaotong University, 2013, 47(07): 1049-1054.

References

［1］Fujiwara Y, Kano I, Takahashi I. Development of an electrohydrodynamic (EHD) micropump to generate oscillating flow at low frequencies ［J］. Journal of Advanced Mechanical Design, Systems, and Manufacturing, 2010, 4(1): 344355.

［2］Hsu C J, Sheen H J. A microfluidic flowconverter based on a doublechamber planar micropump ［J］. Microfluid Nanofluid, 2009, 6: 669678.

［3］Lee C J, Sheen H J, T Z K, et al. A study of PZT valveless micropump with asymmetric obstacles ［J］. Microsyst Thchnol, 2009, 15: 9931000.

［4］王浩，罗先刚，姚汉民,等.微机械往复式无阀泵的振动特性分析［J］.光学精密工程，2005,13(sup):98102.

WANG Hao, LUO Xiangang, YAO Hanmin, et al. Analysis on vibrating characteristic of a micro mechanical valveless pump ［J］. Opt Precision Eng, 2005, 13(sup):98102.

［5］刘国君，程光明，杨志刚.一种压电式精密输液微泵的试验研究［J］.光学精密工程，2006, 14(4)： 612616.

LIU Guojun, CHENG Guanming, YANG Zhigang. Experimental research on a piezoelectric micropump for precision pumping ［J］. Opt Precision Eng, 2006, 14(4): 612616.

［6］My P, Nam S G. Development of a peristalic micropump with lightweight piezocomposite actuator membrane valves ［J］. Int’IJ.Aeronautical & Space Sci, 2011, 12(1): 6977.

［7］Macchion O, Lior N, Rizzi A. Computational study of velocity distribution and pressure drop for designing some gas quench chamber and furnace ducts ［J］. Journal of Materials Processing Technology, 2004, 155156: 17271733.

［8］白兰，冯志庆，吴一辉. 无阀微泵动态特性的固液耦合分析［J］. 机械工程学报，2008, 44(7): 6974.

BAI Lan, FENG Zhiqing, WU Yihui. Solidliquid coupling analysis of valveless micropumps dynamic characteristics［J］. Chinese Journal of Mechanical Engineering, 2008, 44(7): 6974.

［9］Pan L S, Ng T Y. Analytical solutions for the dynamic analysis of a valveless micropumpa fluidmembrane coupling study［J］. Sensors and Actuators A, 2001, 93(2): 173181.

［10］Wang B W, Chu X C, Li E Z, et al. Simulations and analysis of a piezoelectric micropump ［J］. Ultrasonics, 2006, 44: e643e646.

［11］Fan B, Song G, Hussain F. Simulation of a piezoelectrically actuated valveless micropump ［J］. Smart Materials and Structures, 2005, 14: 400405.

［12］Yao Q, Xu D, Pan L S, et al. CFD simulations of flows in valveless micropumps ［J］. Engineering Applications of Computational Fluid Mechanics, 2007, 1（3）:18.

［13］Xie H B, Fu X, Liu L, et al. Research on glass wet etching for micro fluidic devices ［J］. Chinese Journal of Mechanical Engineering, 2003, 39(11): 123129.

［14］崔铮. 微纳米加工技术及其应用［M］. 北京：高等教育出版社， 2005.

［15］Qu X F, Sang F M, Ren J C. Fabrication of PDMS/glass microchips by twofold replication of PDMS and its application in genetic analysis ［J］. J Sep Sci, 2006, 29: 23902394.

［16］Izzo I, Accoto D, Menciassi A, et al. Modeling and experimental validation of a piezoelectric micropump with novel nomovingpart valves ［J］. Sensors and Actuators A, 2007, 133: 128140.

［17］蒋丹，李松晶，杨平. 气泡对无阀微泵动态特性影响的实验研究［J］. 实验流体力学, 2010，24（3）: 3438.

JIANG Dan, LI Songjing, YANG Ping. Experimental study on the influence of bubbles on dynamic characteristics of valveless micropump［J］. Journal of Experiments in Fluid Mechanics, 2010， 24（3）: 3438.

[1]	QIN Guangfei, YAO Huilan, ZHANG Huaixin. Numerical Study of Stern Vibration of a Self-Propulsion Ship in Propeller Induced Pressure Fluctuation [J]. Journal of Shanghai Jiao Tong University, 2022, 56(9): 1148-1158.
[2]	ZHAO Hong, XIE Youjun, LONG Guangcheng, LI Ning, ZHANG Jiawei, CHENG Zhiqing. Mechanical Characteristics and Stress and Strain Analysis of Concrete with Bonding Interface Under Impact Load [J]. Journal of Shanghai Jiao Tong University, 2022, 56(9): 1208-1217.
[3]	JI Pengxiang, AI Wanzheng, DING Tianming. Quantitative Factors of Recovery Length of Flow Pressure Behind Orifice Plate [J]. Journal of Shanghai Jiao Tong University, 2022, 56(8): 1051-1056.
[4]	YANG Qirun, LI Mingguang, CHEN Jinjian, WU Hang. Interaction Mechanisms of Synchronously Performed Adjacent Excavations [J]. Journal of Shanghai Jiao Tong University, 2022, 56(6): 722-729.
[5]	YAO Maohong, CHEN Tielin, FAN Rong, YANG Zili, SHI Ye. Slope Stability Considering the Effects of Air Pressure and Seepage Under Heavy Rainfall Conditions [J]. Journal of Shanghai Jiao Tong University, 2022, 56(6): 739-745.
[6]	LI Yuanfeng (李元丰), WANG Yiling (王怡灵), ZHANG Wanxin∗ (张万欣), LIU Jinian (刘冀念), MA Jialu (马加炉). Sealing Performance of Pressure-Adaptive Seal [J]. J Shanghai Jiaotong Univ Sci, 2022, 27(6): 747-756.
[7]	LI Jia, LI Huacong, WANG Yue. Transient Characteristics of a High-Speed Aero-Fuel Centrifugal Pump in Variable Gas-Liquid Ratio Conditions [J]. Journal of Shanghai Jiao Tong University, 2022, 56(5): 622-634.
[8]	GAO Zihang (高梓航), WANG Xin (王鑫) ZHAO Yifan (赵一帆), JIN Zhehui (金哲慧), WANG Gang (王刚), GAO Shuo∗ (高硕). Piezoelectric-Based Smart Bone Plate for Fracture Healing Progress Monitoring [J]. J Shanghai Jiaotong Univ Sci, 2022, 27(4): 561-569.
[9]	ZOU Zhenfeng, REN Feng, LI Xiaoci, DUAN Haiyang, DU Hailang, HUANG Yonghua. Influence of Pressurization Methods on Cryogenic Helium Pressurization in Rocket Fuel Tank [J]. Journal of Shanghai Jiao Tong University, 2022, 56(3): 386-394.
[10]	LUO Ruiqiao. Application of Down hole Throttle Technology in High Temperature Gas Fields in Eastern South China Sea [J]. Ocean Engineering Equipment and Technology, 2022, 9(1): 58-66.
[11]	ZHANG Wei, JIANG Chaofei, YE Ya’nan, WANG Xiaoyan, GONG Zili, HU Chen, XIAO Yao, GU Hanyang. Experimental Study on Condensation of Steam Jet Injection in Submerged Condition [J]. Journal of Shanghai Jiao Tong University, 2022, 56(1): 1-13.
[12]	HUI Jiuwu, LING Jun, LUAN Zhenhua, WANG Gaixia, DONG He, YUAN Jingqi. A Real-Time Mass Flow Rate Estimation Method of Recirculation Water in Steam Generator of Nuclear Power Plants [J]. Journal of Shanghai Jiao Tong University, 2022, 56(1): 21-27.
[13]	ZHANG Yu,XIAO Xiang. Does High Pressure Promote a Rapid Life Evolution from Anaerobic to Aerobic？ [J]. Journal of Shanghai Jiao Tong University, 2021, 55(Sup.1): 22-23.
[14]	GENG Yong. What Impact Will De-Globalization Impose on Earth’s Ecosystem and Economic Development? [J]. Journal of Shanghai Jiao Tong University, 2021, 55(Sup.1): 82-83.
[15]	LIU Xucheng, GU Bo, ZENG Weijie, DU Zhongxing, TIAN Zhen. Analysis of Frictional Pressure Drop Correlations of Refrigerant Two-Phase Flow in Mini-Channel [J]. Journal of Shanghai Jiao Tong University, 2021, 55(9): 1095-1107.