Piezoelectric Analysis and Testing of Valve-less Micropump

Abstract

Abstract:

A piezoelectric micropump model was proposed for microanalytical reagent by using a piezoelectric transducer as the driving force, a silicon substrate pump and polydinethylsiloxane polymeric membrane material. In order to achieve the maximum driving energy, the modals and driving frequency of the piezoelectric transducer was analyzed using finite element analysis (FEA). It was found out that the pump volumetric efficiency reached the maximum on the first order modal. The best frequency range was between 0 and 1 kHz according to piezoelectricstress coupling analysis. Finally, the micropump models were fabricated with the micro-system fabrication technology, and a performance testing was conducted. The result show that the flow rates reach the maximum value at 60 Hz and 200 Hz under sine driving signal, and the pressure head reaches the maximum value at 60 to 600 Hz, which conforms to the numerical analysis result. The maximum flow rate and pressure head is 34.5 μL/min and 657 Pa according to the experiment.

Key words: micropump, piezoelectric, modals, flow rate, pressure

CLC Number:

GUAN Yanfang1,GENG Tie1,HAN Lili1,LIU Chunbo1，LING Xing2. Piezoelectric Analysis and Testing of Valve-less Micropump[J]. Journal of Shanghai Jiaotong University, 2013, 47(07): 1049-1054.

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