Scheduling Algorithm of Dual-Arm Multi-cluster Tools with Residency Constraints

Abstract

Abstract: According to characteristics of the cluster tools, a problem domain of the scheduling was supposed and defined, and a scheduling algorithm of dual-arm muti-cluster tools with residence constraints was presented as well. A decomposition method is utilized to this algorithm to break multi-cluster tools into several independent single-cluster ones, meanwhile, a free-conflict constraint scheduling algorithm is presented with an objective of minimizing the fundamental period of the current wafers. Simulated experiments were designed to evaluate the proposed algorithm. The results indicate that the proposed algorithm is valid to schedule the wafers on the multi-cluster tools.

Key words: multi-cluster tools, residency constraints, decomposition, scheduling, simulation experiments

CLC Number:

TP 391.9

SHI Xiao-Ming, ZHOU Bing-Hai. Scheduling Algorithm of Dual-Arm Multi-cluster Tools with Residency Constraints[J]. Journal of Shanghai Jiaotong University, 2013, 47(04): 650-655.

References

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