Friction and Wear Behavior of Organic Silane /Rare Earth Self-assemblied Composite Film on Silicon

Abstract

Abstract: The composite film of nanometer rare-earth/silicon coupling reagent MPTS-MPTES was prepared on the hydroxylated single-crystal silicon substrate by a self-assembling process from specially formulated solution. The resultant composite film was characterized by means of atomic force microscope (AFM) and X-ray photoelectron spectroscopy (XPS). The contact angles of distilled water on the silane SAMs and the composite film were measured to compare the surface states. The tribological properties of the films sliding against GCr15 steel ball were evaluated on a DF-PM static-dynamic friction and wear tester. The experimental results show that rare earth (RE) can be easily incorporated in the MPTS-MPTES SAMs and lead to changed surface state of the composite film. Moreover, MPTS-MPTES / RE composite film is effective in reducing friction and resisting wear compared with MPTS-MPTES SAM as it slides against the steel counterpart at a small load, indicating its promising applications in microelectromechanical system (MEMS) field.

Key words: organic silane, rare earth (RE), selfassembled monolayer film, singlecrystal silicon, friction and wear behavior

CLC Number:

TH117.3

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