Abstract: A micro flow sensor integrated inside the flow channel was manufactured by using SU8 as the flow channel which integrated electrodes inside and packaged through the bonding between SU8 and PDMS（polydimethylsiloxane）. According to the calorimetric theory, comsol, a multiphysics simulation and analysis software, was implemented to build the model of thermal micro flow sensor to analyze the key factors’ influences on its sensitivity. Then a micro flow sensor was designed and manufactured with MEMS technology. Finally, the flowvoltage testing of the micro flow sensor was executed.