Abstract: The internal friction spectrum of hot die steel Dievar with quenched into oil and tempered at different temperature was studied. The internal friction spectrum is decomposed into two peaks and background internal friction for quenched steel. One peak is attributed to stressinduced microdiffusion of carbon in martenstic alloy steel at 157.2 °C. The 225.5 °C peak named SKKpeak is related to the interactions between carbon atoms and dislocations. When the mount of carbon in solid solution is reduced by tempering the specimen at an elevated temperature, the height of the peak lowers and the peak shifts to a higher temperature. Some carbides nucleate and grow at dislocations, which induces stress relaxation. Relaxation time increases by the length of dislocation growed. The movement of the internal friction peak position is attributed to the effects of alloying elements and carbon atoms.