边缘修形织构化N、Si共掺杂类金刚石碳膜在
空气中的摩擦磨损性能

doi:10.16183/j.cnki.jsjtu.2018.05.008

摘要/Abstract

摘要： 采用激光加工和抛光方法，在镜面抛光的4Cr13不锈钢基板上制备了凸起面积密度分别为35%、44%和58%的边缘未修形和边缘经圆滑修形处理的圆柱凸起织构，并采用溅射和射频化学气相法在织构表面沉积N、Si共掺杂类金刚石碳(N-Si-DLC)膜；采用球-盘式往复摩擦磨损试验机研究了边缘未修形和边缘修形的凸起织构化N-Si-DLC膜与316L不锈钢球在不同相对湿度(RH=15%，45%，75%)空气中的摩擦磨损性能；同时，基于有限元法分析了稳定摩擦阶段静态接触应力的分布情况.结果表明：边缘修形织构化N-Si-DLC膜的摩擦系数和磨损率均显著低于边缘未修形织构化N-Si-DLC膜，边缘修形效果与织构凸起面积密度有关，并影响织构的摩擦磨损性能；凸起面积密度为44%的边缘修形织构化DLC膜的减摩耐磨效果最佳；织构化DLC膜的摩擦磨损性能与织构边缘的最大接触应力密切相关，采用边缘修形可以大幅减小凸起织构边缘的最大接触应力，从而达到减摩耐磨的效果.

关键词: 类金刚石碳膜, 边缘修形, 织构, 自润滑, 接触应力

Abstract: Normal and edge-profiled textured nitrogen and silicon co-incorporated diamond-like carbon (N-Si-DLC) films with protrusion area densities of 35%, 44% and 58% were prepared by laser ablation, polishing and sputter, RF-CVD methods. The tribological properties of the textured films against the 316L stainless steel ball in air environments under RH 15%, 45% and 75% were investigated by a ball-on-disk type reciprocating tribometer. The finite element method was used to analyze the stress distribution at the contact surfaces in the steady state of sliding. The results show that the edge-profiled textured N-Si-DLC films possess lower friction and wear compared to the normal textured films. The friction and wear showed positive relation to the maximum contact stress appeared at the edge of protrusions. By edge-profiling, the maximum contact stress and sequential friction and wear could be reduced markedly. The reduction effect of edge-profiling is closely related to the protrusion area density and the best effect was obtained for the films with a protrusion area density of 44%.

Key words: diamond-like carbon (DLC) films, edge-profiling, texture, self-lubrication, contact stress

中图分类号:

吴行阳，葛宙，阮敬杰，杨义，牛浩之，陈腾，张建华. 边缘修形织构化N、Si共掺杂类金刚石碳膜在空气中的摩擦磨损性能[J]. 上海交通大学学报（自然版）, 2018, 52(5): 554-560.

WU Xingyang,GE Zhou,RUAN Jingjie,YANG Yi,NIU Haozhi,CHEN Teng,ZHANG Jianhua. Edge-Profiling Effect on the Tribological Properties of Protrusion Textured N-Si-DLC Films in Air[J]. Journal of Shanghai Jiaotong University, 2018, 52(5): 554-560.

参考文献

［1］MORITA T, INOUE K, DING X T, et al. Effect of hybrid surface treatment composed of nitriding and DLC coating on friction-wear properties and fatigue strength of alloy steel［J］. Materials Science and Engineering A, 2016, 661: 105-114. ［2］CHEN T, WU X Y, GE Z, et al. Achieving low friction and wear under various humidity conditions by Co-doping nitrogen and silicon into diamond-like carbon films［J］. Thin Solid Films, 2017, 638: 375-382. ［3］SCHARF T W, PRASAD S V. Solid lubricants: A review［J］. Journal of Materials Science, 2013, 48(2): 511-531. ［4］RASHID H S J, PLACE C S, MBA D, et al. Reliability model for helicopter main gearbox lubrication system using influence diagrams［J］. Reliability Engineering & System Safety, 2015, 139: 50-57. ［5］XU Z Y, ZHENG Y J, JIANG F, et al. The microstructure and mechanical properties of multilayer diamond-like carbon films with different modulation ratios［J］. Applied Surface Science, 2013, 264: 207-212. ［6］STATUTI R, RADI P A, SANTOS L V, et al. A tribological study of the hybrid lubrication of DLC films with oil and water［J］. Wear, 2009, 267(5): 1208-1213. ［7］CHO M H, CHOI H J. Optimization of surface texturing for contact between steel and ultrahigh molecular weight polyethylene under boundary lubrication［J］. Tribology Letters, 2014, 56(3): 409-422. ［8］SIRIPURAM R B, STEPHENS L S. Effect of deterministic asperity geometry on hydrodynamic lubrication［J］. Journal of Tribology, 2004, 126(3): 527-534. ［9］KOVOVALCHENKO A, AJAYI O, ERDEMIR A, et al. Friction and wear behavior of laser textured surface under lubricated initial point contact［J］. Wear, 2011, 271(9/10): 1719-1725. ［10］OSWALD F B, ZARETSKY E V, POPLAWSKI J V. Effect of roller geometry on roller bearing load-life relation［J］. Tribology Transactions, 2014, 57(5): 928-938. ［11］吴行阳, 邓兆星, 黄一鸣, 等. 基于多功率源梯度过渡层的Si-DLC的制备及水润滑性能研究［J］. 摩擦学学报, 2014, 34(6): 684-688. WU Xingyang, DENG Zhaoxing, HUANG Yiming, et al. Preparation and tribological properties in water of Si-DLC film with gradient interlayer deposited by muti-power source technology［J］. Tribology, 2014, 34(6): 684-688. ［12］RAMACHANDRA S, OVAERT T C. Effect of film geometry on contact stresses in two-dimensional discontinuous films［J］. Journal of Tribology, 2000, 122(4): 665-671. ［13］ZHANG B, HUANG W, WANG J Q, et al. Comparison of the effects of surface texture on the surfaces of steel and UHMWPE［J］. Tribology International, 2013, 65: 138-145. ［14］WANG X, YAMAGUCHI A. Characteristics of hydrostatic bearing/seal parts for water hydraulic pumps and motors. Part 1. Experiment and theory［J］. Tribology International, 2002, 35(7): 425-433. ［15］OSHKOUR A A, OSMAN N A A, BAYAT M, et al. Three-dimensional finite element analyses of functionally graded femoral prostheses with different geometrical configurations［J］. Materials & Design, 2014, 56: 998-1008.

[1]	何利华, 潘建峰, 倪敬, 冯凯, 崔智. 压铸铝合金用铣刀表面微织构及切削特性研究[J]. 上海交通大学学报, 2021, 55(6): 750-756.
[2]	刘郡，张执南，谢友柏. 低黏度润滑油与织构对活塞环-缸套摩擦特性的影响[J]. 上海交通大学学报（自然版）, 2018, 52(5): 505-510.
[3]	李星亮1,2，岳文1,3，庞长涛2，徐昌语2，康嘉杰1,3，田斌1,4. 渗氮处理对表面织构化钛在月壤介质中摩擦磨损性能的影响[J]. 上海交通大学学报（自然版）, 2018, 52(5): 561-567.
[4]	倪敬，李斌，许静. 仿雨滴织构拉刀减磨润滑机制[J]. 上海交通大学学报（自然版）, 2018, 52(3): 340-347.