• 学报（中文） •

### 基于桥式放大机构的薄膜致动器设计

1. 上海交通大学 机械系统与振动国家重点实验室， 上海 200240
• 基金资助:
国家自然科学基金项目（61273342）

### Design of the Film Actuator Based on Bridge-Type Mechanism

LIU Jihao,YAN Weixin,LI Peixing,PAN Gen,ZHAO Yanzheng

1. State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai 200240, China

Abstract: A high frequency film actuator for the micropump is proposed based on the bridge-type mechanism. The bridge-type mechanism contributes to the improvement in the amplification ratio, and the linkage mechanism is employed to eliminate the output drift. The ideal model and the elastic theory are respectively used to establish the kinematic characteristics and the deformation of the film actuator in order to investigate the displacement amplification ratio and the output drift. It is possible for the rotational symmetric configuration to reduce the thermal deformations. By the finite element analysis in ANSYS software and prototype experiments the mechanical design and the displacement amplification ratio are evaluated. The prototype was made by MEMS technology, and had the maximum output displacement of 50 μm and the displacement amplification ratio of 23. If the geometric relation agrees with the developed conditions, the output displacement is only relative to the mean of the input displacements, and no output radial displacement exists because of the difference among the inputs.