基于桥式放大机构的薄膜致动器设计

doi:10.16183/j.cnki.jsjtu.2018.04.007

摘要/Abstract

摘要： 提出了一种基于桥式放大机构的柔性薄膜致动器设计.该设计采用桥式放大机构提高致动器位移输出特性，利用并联耦合连杆机构降低输出漂移.采用理想模型和弹性梁理论，对薄膜致动器的运动学特性与形变位移模型建模，深入探究机构位移放大比和输出漂移误差.中心旋转对称式的机构拓扑构型，降低热变产生的寄生位移.通过ANSYS有限元模拟以及样机实验，验证致动器机构设计和位移放大比.采用MEMS工艺设计的样机，最大输出位移为50μm，位移放大比为23.设计参数满足约束要求时，机构输出位移大小只与并联输入位移的均值相关，径向位移不会因输入位移大小的差异产生.

关键词: 薄膜致动器, 桥式机构, 弹性理论, 位移放大比

Abstract: A high frequency film actuator for the micropump is proposed based on the bridge-type mechanism. The bridge-type mechanism contributes to the improvement in the amplification ratio, and the linkage mechanism is employed to eliminate the output drift. The ideal model and the elastic theory are respectively used to establish the kinematic characteristics and the deformation of the film actuator in order to investigate the displacement amplification ratio and the output drift. It is possible for the rotational symmetric configuration to reduce the thermal deformations. By the finite element analysis in ANSYS software and prototype experiments the mechanical design and the displacement amplification ratio are evaluated. The prototype was made by MEMS technology, and had the maximum output displacement of 50 μm and the displacement amplification ratio of 23. If the geometric relation agrees with the developed conditions, the output displacement is only relative to the mean of the input displacements, and no output radial displacement exists because of the difference among the inputs.

Key words: film actuator, bridge-type mechanism, elastic theory, displacement amplification ratio

中图分类号:

TH 132

刘积昊，闫维新，李培兴，潘根，赵言正. 基于桥式放大机构的薄膜致动器设计[J]. 上海交通大学学报（自然版）, 2018, 52(4): 429-436.

LIU Jihao,YAN Weixin,LI Peixing,PAN Gen,ZHAO Yanzheng. Design of the Film Actuator Based on Bridge-Type Mechanism[J]. Journal of Shanghai Jiaotong University, 2018, 52(4): 429-436.

参考文献

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