上海交通大学学报

上海交通大学学报（自然版）

• 自动化技术、计算机技术 • 上一篇    下一篇

晶圆制造系统中Lot加工序列优化的蚁群算法

姚世清,江志斌,郭乘涛,胡鸿韬   

  1. (上海交通大学 机械与动力工程学院，上海 200240)
  • 收稿日期:2008-01-28 修回日期:1900-01-01 出版日期:2008-10-28 发布日期:2008-10-28
  • 通讯作者: 江志斌

Ant Algorithm for Lot Sequencing in Wafer Fabrication System

YAO Shi-qing, JIANG Zhi-bin, GUO Cheng-tao, HU Hong-tao   

  1. (School of Mechanical Engineering, Shanghai Jiaotong University, Shanghai 200240, China)
  • Received:2008-01-28 Revised:1900-01-01 Online:2008-10-28 Published:2008-10-28
  • Contact: JIANG Zhi-bin

摘要： 针对半导体晶圆制造系统中设备从缓冲区选择Lot加工问题，提出Lot加工序列优化的蚁群算法，对其进行计算时间复杂度分析，并给出了该算法的改进形式.该改进算法是根据晶圆制造系统重入特点，基于瓶颈设备构建蚁群算法求解模型，通过迭代仿真最终获取Lot加工优先序列表.仿真结果表明，采用该算法在短期调度区间内，与一般的基于规则的动态调度算法相比，效果得到了显著的改善.

关键词: 半导体晶圆制造系统, 蚁群算法, 离散事件仿真

Abstract: Lot sequencing optimization based on ant algorithm, which solves choosing lots from buffers to be processed in semiconductor wafer fabrication system (SWFS), was proposed. Furthermore, time complexity of this algorithm was analyzed and the improved form was given. According to the characteristics of reentrant in SWFS, the algorithm was designed through constructing the model of ant algorithm based on bottlenecks, and eventually Lot priority sequencing was obtained by iterative simulation. It can be seen from the simulation result that the new algorithm is superior to common dispatching rules in shortterm scheduling.

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