上海交通大学学报

上海交通大学学报（自然版）

• 自动化技术、计算机技术 • 上一篇    下一篇

基于Markov链的集束型晶圆制造设备预防性维护建模

周炳海，何平，潘尔顺，奚立峰   

  1. (上海交通大学 机械与动力工程学院， 上海 200240)
  • 收稿日期:2007-11-21 修回日期:1900-01-01 出版日期:2008-10-28 发布日期:2008-10-28
  • 通讯作者: 周炳海

Preventive Maintenance Modeling of Cluster Tools for Fabrication Wafers Based on Markov Chain

ZHOU Bing-hai, HE Ping, PAN Er-shun, XI Li-feng   

  1. (School of Mechanical Engineering, Shanghai Jiaotong University, Shanghai 200240, China)
  • Received:2007-11-21 Revised:1900-01-01 Online:2008-10-28 Published:2008-10-28
  • Contact: ZHOU Bing-hai

摘要： 为了有效提高集束型晶圆制造设备的运行可靠性，同时降低其维护成本，提出了基于Markov链的预防性维护建模方法.根据集束型晶圆制造设备的特点，将设备使用情形分为运行状态、预防性保养状态、保养未能回复状态、预防性维修状态和维修无法回复状态，建立了设备状态转移模型.在此基础上，建立了集束型晶圆制造设备的预防性维护成本模型，进行了仿真实验分析.结果表明，该模型可有效分析不同参数组合下的单位时间预防性维护期望成本.

关键词: 集束型设备, 晶圆, 马尔可夫链, 预防性维护

Abstract: To improve the running reliability of cluster tools for fabrication wafers, and to reduce maintenance cost efficiently, a Markov chainbased modeling method for preventive maintenance was proposed. According to the characteristics of the cluster tools, five states are defined, such as the running state, preventive maintenance (PM) state, PM unrestore state, preventive repair (PR) state and PR unrestore state. A state transition model was built with the five states. On the basis of the proposed model, an expected preventive maintenance cost model was presented. Finally, the built model was tested with simulative experiment data. The results indicate that the Markov chainbased preventive maintenance model is valid for analyzing the expected maintenance cost rate per unit time according to different combinations of modeling parameters.

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