Design of Fast Steering Mirror Based on Displacement Amplification Mechanism

doi:10.16183/j.cnki.jsjtu.2020.103

Abstract

Abstract:

According to the current situation that the deflection angle of the piezoelectric ceramics direct drive fast steering mirror (FSM) is restricted by small elongation of piezoelectric ceramics and the large deflection angle cannot be realized, a novel piezoelectric FSM is designed. A two-stage lever-type amplification mechanism is adopted to realize the amplification of small displacement of piezoelectric ceramics and a strain gauge attached to the amplification mechanism is considered as the displacement sensor. The experimental results indicate that the deflection angle of the designed FSM is larger than 50 mrad, and the closed-loop linearity is below 0.5%, which satisfies the requirements of large deflection angle and accuracy pointing for light beam.

Key words: amplification mechanism, piezoelectric ceramics, fast steering mirror (FSM)

CLC Number:

TN384

XIE Yong, LIU Chongfei, JIA Jianjun, DAI Jiansheng. Design of Fast Steering Mirror Based on Displacement Amplification Mechanism[J]. Journal of Shanghai Jiao Tong University, 2021, 55(9): 1142-1150.

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基本参数	取值
型号	PI-887.91
外形尺寸/(mm×mm×mm)	7×7×36
刚度/(N·μm^-1)	50
标称位移/μm@100V	32
最大出力/N	1850
静电容量/μF±20%	6.4

s₁/μm	s₂/μm	β
10	89.60	8.96
20	179.20	8.96
30	268.79	8.96
40	358.39	8.96
50	447.99	8.96
60	537.59	8.96

组部件名称	材料名称	ρ/(kg·m^-3)	E/GPa	μ
反射镜	微晶玻璃	2530	91	0.24
镜座	铝基碳化硅	3000	180	0.20
柔性铰链	钛合金	4530	110	0.30
放大机构	不锈钢	7850	200	0.30
压电陶瓷	锆钛酸铅	7500	76	0.32
底座	铝合金	2700	69	0.33

序号	参数	取值
1	θ_x/mrad	52.93
2	e_x/mrad	0.221
3	σ_x/%	0.418
4	θ_y/mrad	55.41
5	e_y/mrad	0.157
6	σ_y/%	0.283

序号	参数	本文FSM		PI-S335
序号	参数	x轴	y轴	PI-S335
1	θ/mrad	52.93	55.41	35
2	σ/%	0.418	0.283	0.05
3	δ/μrad	10.40	6.09	1
4	f/Hz	105.45	125.97	700
5	D/mm	70×50×6(椭圆形)		?25.4×5(圆形)