J Shanghai Jiaotong Univ Sci

Journal of Shanghai Jiaotong University(Science) >

2021 , Vol. 26 >Issue 4: 454 - 462

DOI: https://doi.org/10.1007/s12204-021-2315-3

Automation Technology

Fabrication and Performance Investigation of Karma Alloy Thin Film Strain Gauge

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  • (1. National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University,
    Shanghai 200240, China; 2. Department of Micro/Nano Electronics, School of Electronic Information and Electrical
    Engineering, Shanghai Jiao Tong University, Shanghai 200240, China; 3. AVIC Beijing Changcheng Aeronautical
    Measurement and Control Technology Research Institute, Beijing 100022, China)

Online published: 2021-06-06

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Abstract

Karma alloy thin film strain gauges were fabricated on alumina substrates by magnetron sputtering. The electrical properties of strain gauges annealed at different temperatures were then tested. The surface morphology and phase structure of the Karma alloy thin films were analyzed using X-ray diffraction and scanning electron microscopy. The effect of the annealing temperature on the performance of the Karma alloy thin film strain gauge was also investigated. As the annealing temperature increased, it was found that the resistivity of the thin films decreased, whereas the temperature coefficient of resistance (TCR) of the thin films increased. A Karma alloy thin film strain gauge was annealed at 200 °C, thereby obtaining a gauge factor of 1.7 and a corresponding TCR of 64.8 × 10-6 K-1. The prepared Karma alloy thin film strain gauge had a lower TCR than other strain gauges at room temperature. This result can provide a reference for the preparation and application of Karma alloy thin film strain gauges in specific scenarios.

Key words： thin film strain gauge; Karma alloy; magnetron sputtering; coefficient of resistance (TCR); gauge factor

Cite this article

LEI Peng (雷鹏), ZHANG Congchun (张丛春), PANG Yawen (庞雅文), YANG Shenyong (杨伸勇), ZHANG Meiju (张梅菊) . Fabrication and Performance Investigation of Karma Alloy Thin Film Strain Gauge[J]. Journal of Shanghai Jiaotong University(Science), 2021 , 26(4) : 454 -462 . DOI: 10.1007/s12204-021-2315-3

References

[1] KALININ V, LEIGH A, STOPPS A, et al. SAW torque sensor for marine applications [C]//Proceedings of IEEE 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium. Piscataway: IEEE, 2017:347-352.
[2] JIANG X X, CHEN H B, CHEN Z K, et al. The research on torque measurement system based on surface acoustic wave sensor [C]//Proceedings of the 2017 IEEE International Conference on Information,Communication and Engineering. Piscataway: IEEE,2017: 400-403.
[3] CHEN T, ZHANG Y. Research on marine diesel engine crankshaft pressure monitoring system [J]. China Water Transport, 2015, 15(10): 163-164 (in Chinese).
[4] LIU H, JIANG S W, JIANG H C, et al. Fabrication of PdCr thin film strain gauge and investigation on its sensitive properties at high temperature [J]. Chinese Journal of Sensors and Actuators, 2017, 30(3): 348-352 (in Chinese).
[5] CUI Y X, ZHANG Z C, DING W Y, et al. Study on fabrication of NiCr films based high temperature resistance strain gauge and its high temperature performance[J]. Chinese Journal of Scientific Instrument,2016, 37(7): 1548-1555 (in Chinese).
[6] GRANT H P, PRZYBYSZEWSKI J S, ANDERSON W L, et al. Thin film strain gage development program [R]. Cleveland, Ohio: National Aeronautics and Space Administration, Lewis Research Center, 1983: 1-194.
[7] ZHANG J, YANG X D, JIANG S W, et al. Research and fabrication of NiCrAlY thin-film strain gauges[J]. Transducer and Microsystem Technologies, 2015, 34(4): 105-107 (in Chinese).
[8] YANG S Y, LI H F, LIN X K, et al. Effect of Al2O3/Al bilayer protective coatings on the high-temperature stability of PdCr thin film strain gages [J]. Journal of Alloys and Compounds, 2018, 759: 1-7.
[9] GREGORY O J, CHEN X M, CRISMAN E E. Strain and temperature effects in indium–tin-oxide sensors [J]. Thin Solid Films, 2010, 518(19): 5622-5625.
[10] AYERDI I, CASTA?NO E, GARCIA-ALONSO A, et al. Ceramic pressure sensor based on tantalum thin film [J]. Sensors and Actuators A, 1994, 42(1/2/3):435-438.
[11] YIN F Y. Strain gauge sensitive material and its characteristics[J]. Weighing Instrument, 1998, 27(4): 45-49 (in Chinese).
[12] GREENE J E. Tracing the recorded history of thinfilm sputter deposition: From the 1800s to 2017 [J].Journal of Vacuum Science & Technology A, 2017,35(5): 05C204.
[13] SUN H T,WANG X P, WANG L J, et al. Effect of annealing temperature on structural electrical and optical properties of ZnO/Mo/ZnO transparent conductive films [J]. Journal of Materials & Engineering, 2015,33(3): 352-351 (in Chinese).
[14] LIU Y M, ZHANG J J, ZHANG W G, et al. Effects of annealing temperature on the properties of copper films prepared by magnetron sputtering [J]. Journal of Wuhan University of Technology (Materials Science Edition), 2015, 30(1): 92-96.
[15] ZHANG H Y, LYU Y M. Effect of annealing temperature to the characteristics of Al-Nd alloy films [J].Applications of IC, 2019, 36(6): 34-35 (in Chinese).
[16] KIM Y J, LEE W B, CHOI K K. Effect of seed layers and rapid thermal annealing on the temperature coefficient of resistance of Ni-Cr thin films [J]. Thin Solid Films, 2019, 675: 96-102.
[17] LAI L F, WANG J X, WANG H T, et al. Structures and properties of C-doped NiCr thin film deposited by closed-field unbalanced magnetron sputtering [J].Journal of Electronic Materials, 2017, 46(1): 552-562.
[18] PETLEY V, SATHISHKUMAR S, THULASI RAMAN K H, et al. Microstructural and mechanical characteristics of Ni–Cr thin films [J]. Materials Research Bulletin, 2015, 66: 59-64.
[19] SHEN B Z, PENG L P, WANG X M, et al. Morphology structure and electrical properties of NiCr thin film grown on the substrate of silicon prepared by magnetron sputtering [J]. Journal of Wuhan University ofTechnology (Materials Science Edition), 2015, 30(2):380-385.
[20] CHUANG N C, LIN J T, CHEN H R. TCR control of Ni–Cr resistive film deposited by DC magnetron sputtering[J]. vacuum, 2015, 119: 200-203.
[21] WANG X P, ZHAO T X, JI H, et al. Effect of grain size on temperature coefficient of film resistivity of Pd thin films [J]. Acta Physica Sinica, 1994, 43(2): 297-302 (in Chinese).

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