Abstract: In response to safety concerns caused by wafer transmission robot collisions in confined vacuum chambers, which can lead to wafer breakage and production line contamination, a collision detection and response method is proposed, leveraging the robot’s dynamics model and adjustable acceleration thresholds. The structure and motion characteristics of the robot were first analyzed. Subsequently, its kinematic and dynamic models were established and validated via simulation. To reduce noise interference, the dynamics model was computed using a reference trajectory from the host planner. Cross-correlation analysis was used to identify phase differences between the planned and encoder feedback trajectories, enabling phase compensation. For collision threshold settings, an acceleration-based adjustment scheme was developed, taking into account potential collision risk levels. Experimental tests on the vacuum robot verified the effectiveness of the proposed method.

Key words: vacuum wafer transfer robot, collision detection, force estimation

摘要： 针对晶圆传输机器人在狭小的真空腔体内发生碰撞后会导致晶圆碎片和生产线污染的安全问题，提出了一种基于机器人动力学模型与加速度调节阈值的碰撞检测与响应方案。首先，对晶圆传输机器人的结构与运动特点进行了分析；在此基础上建立了机器人的运动学模型和动力学模型并在仿真软件上进行了仿真验证。为避免噪声的引入，使用在上位机规划的轨迹来计算机器人动力学模型；基于互相关分析出规划轨迹与编码器反馈得到的轨迹之间的相位差，并在算法中进行了相位补偿。在碰撞阈值的设定方面，视机器人发生碰撞的风险程度，基于机器人的加速度制定了阈值调节方案。最后，在真空晶圆传输机器人上开展了碰撞检测实验；实验结果证明了该方法的有效性。

关键词: 真空晶圆传输机器人，碰撞检测，力估计