J Shanghai Jiaotong Univ Sci ›› 2025, Vol. 30 ›› Issue (2): 262-269.doi: 10.1007/s12204-023-2597-8

• Engieering and Technology • Previous Articles     Next Articles

Piezoelectric Materials Full-Matrix Constants Characterization Based on Local Electrodes Using One Sample

基于局部电极的压电材料全矩阵常数单样品表征

冯其云,吴校生,赵俊军 ,曾照丰 ,李健 ,尹承彬   

  1. National Key Laboratory of Science and Technology on Micro/Nano Fabrication; Department of Micro/Nano Electronics, Shanghai Jiao Tong University, Shanghai 200240, China
  2. 上海交通大学 微米/纳米加工技术国家级重点实验室;微纳电子学系,上海200240
  • Accepted:2022-02-10 Online:2025-03-21 Published:2025-03-21

Abstract: A novel characterization method for full-matrix constants of PZT-8 piezoceramics based on local electrodes excitation using one sample is proposed to avoid resonant peaks missing and overlapping in the inversion process of resonant ultrasound spectroscopy technology. Elastic matrix, which is sensitive to the resonance spectrum, is obtained by resonant ultrasound spectroscopy. Piezoelectric and dielectric matrices, which are sensitive to the capacitance of driving electrodes, are determined by capacitance inversion. The initial values of elastic constants are deviated by 30% to validate the reliability of this method. The relative errors between measured and inversed values of resonant frequencies are less than 1% and the relative errors of the capacitance are mostly less than 5%. The work has extensive applications in piezoelectric materials characterization.

Key words: resonant ultrasound spectroscopy, local electrodes, capacitance inversion, characterization

摘要: 为了避免超声谐振谱反演过程中峰的丢失和重叠,提出了一种基于局部电极激励的压电陶瓷PZT-8全矩阵常数单样品表征方法。通过超声谐振谱技术获得对谐振谱敏感的弹性矩阵。通过电容反演方法确定对驱动电极电容敏感的压电和介电矩阵。为验证该方法的可靠性,将弹性常数的初始值偏离30%。谐振频率的测量值与反演值的相对误差低于1%;电容的相对误差大部分低于5%。这项工作在压电材料表征方面有着广泛的应用。

关键词: 超声谐振谱,局部电极,电容反演,表征

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