Hybrid Process of Fabricating High-Quality Micro Wine-Glass Fused Silica Resonators

doi:10.1007/s12204-017-1832-6

上海交通大学学报（英文版） ›› 2017, Vol. 22 ›› Issue (3): 274-279.doi: 10.1007/s12204-017-1832-6

Hybrid Process of Fabricating High-Quality Micro Wine-Glass Fused Silica Resonators

XING Yaliang (邢亚亮), ZHANG Weiping* (张卫平), TANG Jian (唐健),SUN Dianjun (孙殿俊), LIU Zhaoyang (刘朝阳), OU Bin (欧斌)

(National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Micro Fabrication of Ministry of Education and Shanghai Key Laboratory of Navigation and Location-Based Services, Department of Micro/Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China)

出版日期:2017-06-02 发布日期:2017-06-04
通讯作者: ZHANG Weiping (张卫平) E-mail:zhangwp@sjtu.edu.cn

Hybrid Process of Fabricating High-Quality Micro Wine-Glass Fused Silica Resonators

XING Yaliang (邢亚亮), ZHANG Weiping* (张卫平), TANG Jian (唐健),SUN Dianjun (孙殿俊), LIU Zhaoyang (刘朝阳), OU Bin (欧斌)

(National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Micro Fabrication of Ministry of Education and Shanghai Key Laboratory of Navigation and Location-Based Services, Department of Micro/Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China)

Online:2017-06-02 Published:2017-06-04
Contact: ZHANG Weiping (张卫平) E-mail:zhangwp@sjtu.edu.cn

摘要/Abstract

摘要： A new hybrid method, which combines improved glass-blown technology with wet etching, is reported to fabricate micro wine-glass resonators with high-quality fused silica. The optimum placement is compared to achieve the resonators with good shell shape. The typical shell diameter is about 4mm and its thickness covers from dozens to hundreds of micrometers. The etching rates in corrosion solutions with different ratios and at different thicknesses of hemispherical shells are studied. We also conclude how to precisely control the thickness. The corrosion solutions with different ratios of HF solution to NH4F solution make the spherical shells rougher in different degrees. The best roughness is 0.581 nm in the 1 : 8 ratio corrosion solution while the original roughness is 0.537 nm. This fact shows that the resonator remains atomically smooth surface. Based on the glassblowing spherical fused silica structure, the thickness of the resonator is effectively controlled by buffered oxide etch (BOE) technology according to the measured etching rate. The measured resonant frequency of the hemispherical shell at ambient pressure and room temperature is 1.75 kHz of rocking mode which is close to the simulated frequency. Using such a low-cost hybrid approach, we can fabricate high-quality microscale resonators in batch.

关键词: hemispherical resonator, wet etching, glassblowing, fused silica

Abstract: A new hybrid method, which combines improved glass-blown technology with wet etching, is reported to fabricate micro wine-glass resonators with high-quality fused silica. The optimum placement is compared to achieve the resonators with good shell shape. The typical shell diameter is about 4mm and its thickness covers from dozens to hundreds of micrometers. The etching rates in corrosion solutions with different ratios and at different thicknesses of hemispherical shells are studied. We also conclude how to precisely control the thickness. The corrosion solutions with different ratios of HF solution to NH4F solution make the spherical shells rougher in different degrees. The best roughness is 0.581 nm in the 1 : 8 ratio corrosion solution while the original roughness is 0.537 nm. This fact shows that the resonator remains atomically smooth surface. Based on the glassblowing spherical fused silica structure, the thickness of the resonator is effectively controlled by buffered oxide etch (BOE) technology according to the measured etching rate. The measured resonant frequency of the hemispherical shell at ambient pressure and room temperature is 1.75 kHz of rocking mode which is close to the simulated frequency. Using such a low-cost hybrid approach, we can fabricate high-quality microscale resonators in batch.

Key words: fused silica, hemispherical resonator, wet etching, glassblowing

中图分类号:

V 241.5

XING Yaliang (邢亚亮), ZHANG Weiping* (张卫平), TANG Jian (唐健),SUN Dianjun (孙殿俊), LIU . Hybrid Process of Fabricating High-Quality Micro Wine-Glass Fused Silica Resonators[J]. 上海交通大学学报（英文版）, 2017, 22(3): 274-279.

XING Yaliang (邢亚亮), ZHANG Weiping* (张卫平), TANG Jian (唐健),SUN Dianjun (孙殿俊), LIU Zhaoyang (刘朝阳), OU Bin (欧斌). Hybrid Process of Fabricating High-Quality Micro Wine-Glass Fused Silica Resonators[J]. Journal of shanghai Jiaotong University (Science), 2017, 22(3): 274-279.

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Hybrid Process of Fabricating High-Quality Micro Wine-Glass Fused Silica Resonators

Hybrid Process of Fabricating High-Quality Micro Wine-Glass Fused Silica Resonators

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