Simulation Method of Chemical Mechanical Polishing Flow Field Based on
Porous Media and Dynamic Mesh
FANG Shengwei1, 2, CHEN Shifei1, 2, ZHANG Bin3, LI Sujie1, 2, JIANG Neng4, TANG Jun4, WANG Xinchang1, 2
Journal of Shanghai Jiao Tong University
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0, (): 1
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DOI: 10.16183/j.cnki.jsjtu.2025.287
