Research of Anti-High Overload Performance of U- and V- Shaped Micro Electrothermal Actuators
CHEN Wangsheng, CAO Yun, KONG Xiaoyu, XIE Haipeng, XI Zhanwen
Journal of Shanghai Jiao Tong University . 0, (): 0 .  DOI: 10.16183/j.cnki.jsjtu.2024.342