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主管：中华人民共和国教育部
主办：上海交通大学
ISSN 1006-2467 CN 31-1466/U
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Journal of Shanghai Jiao Tong University
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中文
Molecular Dynamics Simulation of Polishing Process of Silicon Carbide Under Ultrasonic Vibration Conditions
ZHAI Wenjie，YANG Dezhong,GONG Na
Journal of Shanghai Jiaotong University . 2018, (
5
): 599 -603 . DOI: 10.16183/j.cnki.jsjtu.2018.05.015
