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主管：中华人民共和国教育部
主办：上海交通大学
ISSN 1006-2467 CN 31-1466/U
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Journal of Shanghai Jiao Tong University
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中文
Preventive Maintenance Modeling of Cluster Tools for Fabrication Wafers Based on Markov Chain
ZHOU Bing-hai, HE Ping, PAN Er-shun, XI Li-feng
Journal of Shanghai Jiaotong University . 2008, (
10
): 1622 -1626 .
