Journal of Shanghai Jiao Tong University

Journal of Shanghai Jiaotong University >

2021 , Vol. 55 >Issue 10: 1263 - 1271

DOI: https://doi.org/10.16183/j.cnki.jsjtu.2020.216

Theoretical Model and Dynamic Performance of V-Shaped Electrothermal Actuator

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  • School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China

Received date: 2020-07-13

  Online published: 2021-11-01

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Abstract

To study the dynamic performance of the V-shaped electrothermal actuator, electrothermal and thermoelastic coupling models are established based on the heat transfer theory and the forced vibration equation, respectively. A one dimensional multi-physical field coupling theoretical model of the V-shaped electrothermal actuator is proposed. The electrothermal coupling model is solved by the method in which the sine transformation and the implicit difference are combined together. Then, a convergence test is performed. The number of discrete points in the sine transformation has less influence on the temperature stability. The transient and static temperature distributions of the model coincide with that of the finite element method (FEM) at different voltages. The static displacements gained by the experiment and the edge detection algorithm also match well with that gained by the thermoelastic coupling model at different voltages. Based on the proposed model, the dynamic performances of the actuator at step and sine voltages are analyzed. The research results indicate that changes of temperature and displacement in the middle of the V-shaped electrothermal actuator are larger with the amplitude of sine voltage increasing. When the loading time of sine voltage is larger than 5 periods (50 ms), the average temperature and displacement in the middle of the actuator are equal to those with equivalent direct voltage. When applied to a periodic voltage, the motion of the actuator is also gradually cyclical and has the same time period with the voltage cycle.

Key words： electrothermal actuator; coupling; sine transformation; forced vibration; edge detection

Cite this article

CHEN Hao, WANG Xinjie, WANG Jiong, XI Zhanwen, NIE Weirong . Theoretical Model and Dynamic Performance of V-Shaped Electrothermal Actuator[J]. Journal of Shanghai Jiaotong University, 2021 , 55(10) : 1263 -1271 . DOI: 10.16183/j.cnki.jsjtu.2020.216

References

[1] HUSSEIN H, TAHHAN A, MOAL P L, et al. Dynamic electro-thermo-mechanical modelling of a U-shaped electro-thermal actuator[J]. Journal of Micromechanics and Microengineering, 2016, 26(2):025010.
[2] LEE C, WU C Y. Study of electrothermal V-beam actuators and latched mechanism for optical switch[J]. Journal of Micromechanics and Microengineering, 2004, 15(1):11-19.
[3] PUSTAN M, CHIOREAN R, BIRLEANU C, et al. Reliability design of thermally actuated MEMS switches based on V-shape beams[J]. Microsystem Technologies, 2017, 23(9):3863-3871.
[4] ZHANG Z, YU Y Q, ZHANG X P. Theoretical modal analysis and parameter study of Z-shaped electrothermal microactuators[J]. Microsystem Technologies, 2018, 24(7):3149-3160.
[5] 申跃跃. 应用于硅基MEMS安全系统的电热致动器研究[D]. 北京: 北京理工大学, 2015.
[5] SHEN Yueyue. The research of electrothermal actuator applied in MEMS safe and ARM system on silicon[D]. Beijing: Beijing Institute of Technology, 2015.
[6] ZHANG Z, YU Y Q, LIU X Y, et al. Dynamic modelling and analysis of V- and Z-shaped electrothermal microactuators[J]. Microsystem Technologies, 2017, 23(8):3775-3789.
[7] VAMEGH ESTAHBANATI S, DHAOUADI R, BAKRI-KASSEM M. Macromodeling of thermally driven V-shaped MEMS actuators[J]. Mechatronics, 2017, 46:193-204.
[8] ZHANG Z, ZHANG W Z, WU Q Y, et al. A comprehensive analytical model and experimental validation of Z-shaped electrothermal microactuators[M]// BAI S P, CECCARELLI M. Recent advances in mechanism design for robotics. Heidelberg, Germany, 2015.
[9] SHAN T Q, QI X L, CUI L, et al. Thermal behavior modeling and characteristics analysis of electrothermal microactuators[J]. Microsystem Technologies, 2017, 23(7):2629-2640.
[10] THANGAVEL A, RENGASWAMY R, SUKUMAR P K, et al. Modelling of Chevron electrothermal actuator and its performance analysis[J]. Microsystem Technologies, 2018, 24(4):1767-1774.
[11] KWAN A M H, SONG S C, LU X, et al. Improved designs for an electrothermal in-plane microactuator[J]. Journal of Microelectromechanical Systems, 2012, 21(3):586-595.
[12] CHU L L, QUE L, OLIVER A D, et al. Lifetime studies of electrothermal bent-beam actuators in single-crystal silicon and polysilicon[J]. Journal of Microelectromechanical Systems, 2006, 15(3):498-506.
[13] VOICU R C. Design, numerical simulation and experimental investigation of an SU-8 microgripper based on the cascaded V-shaped electrothermal actuators[J]. Journal of Physics: Conference Series, 2016, 757:012015.
[14] VOICU R C, TIBEICA C, MÜLLER R, et al. Design, simulation and testing of polymeric microgrippers with V-shaped electrothermal actuators and encapsulated heaters[C]// 2016 International Semiconductor Conference (CAS). Piscataway, NJ, USA: IEEE, 2016: 89-92.
[15] HICKEY R, SAMEOTO D, HUBBARD T, et al. Time and frequency response of two-arm micromachined thermal actuators[J]. Journal of Micromechanics and Microengineering, 2003, 13(1):40-46.
[16] PRESS W H, WILLIAM H, TEUKOLSKY S A, et al. Numerical recipes: The art of scientific computing [M]. 3rd ed. Cambridge, UK: Cambridge University Press, 2007.
[17] 胡金迪, 肖炳甲, 罗正平, 等. 基于紧致差分的Grad-Shafranov方程快速解法[J]. 核聚变与等离子体物理, 2018, 38(1):8-14.
[17] HU Jindi, XIAO Bingjia, LUO Zhengping, et al. Fast direct solver for Grad-Shafranov equation based on compact scheme[J]. Nuclear Fusion and Plasma Physics, 2018, 38(1):8-14.
[18] CHEN H, WANG X J, WANG J, et al. Analysis of the dynamic behavior of a V-shaped electrothermal microactuator[J]. Journal of Micromechanics and Microengineering, 2020, 30(8):085005.
[19] KOLAHDOOZAN M, ROUHANI ESFAHANI A, HASSANI M. Experimental and numerical investigation of the arms displacement in a new electrothermal MEMS actuator[J]. International Journal of Advanced Design and Manufacturing Technology, 2017, 10(2):71-81.
[20] BOUHADDA I, MOHAND-OUSAID A, LE MOAL P, et al. Dynamic characterization of an electrothermal actuator devoted to discrete MEMS positioning[C]// 2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP). Bordeaux, France: IEEE, 2017: 1-4.
[21] 袁春兰, 熊宗龙, 周雪花, 等. 基于Sobel算子的图像边缘检测研究[J]. 激光与红外, 2009, 39(1):85-87.
[21] YUAN Chunlan, XIONG Zonglong, ZHOU Xuehua, et al. Study of infrared image edge detection based on Sobel operator[J]. Laser & Infrared, 2009, 39(1):85-87.
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