With the rapid development of the telecommunications industry and microelectronics technologies, and with the increasingly clear development trend of fifth-generation (5G) communications, higher requirements have been placed on the performance of high-frequency miniaturized RF filters. The manufacture of BAW resonator filter is the most promising technology. Based on a large number of studies, this paper summarizes the preparation and optimization technologies of solidly mounted bulk acoustic resonator (SMR). Based on the technology of thin film roughness optimization, an AlN-ZnO co-resonating SMR was proposed to optimize the piezoelectric property and 〈0002〉 texture of ZnO film. The corresponding SMR is prepared and has achieved good device performance parameters. The series resonating Qs value is 616.2, the parallel resonating Qp value is 429.4, and the effect electromechanical coupling factor k2eff is 2.27%. This paper provides an innovative solution for the mass production of SMR.
ZHANG Yafei,LIU Yijian,LI Zhongli,ZHANG Yaozhong,SU Yanjie,LIU Gang
. Fabrication Technologies Research on
Solidly Mounted Bulk Acoustic Resonator[J]. Journal of Shanghai Jiaotong University, 2018
, 52(10)
: 1242
-1248
.
DOI: 10.16183/j.cnki.jsjtu.2018.10.012
［1］RUBY R. Review and comparison of bulk acoustic wave FBAR, SMR technology ［C］//Proceedings of the 2007 IEEE Ultrasonics Symposium. New York, NY, USA: IEEE, 2007: 1029-1040.
［2］NEWELL W E. Face-mountd piezoelectric resonator ［J］. Proceedings of IEEE, 1965, 53(6): 575-581.
［3］AIGNER R, ELLA J, TIMME H J, et al. Advancement of MEMS into RF-filter applications ［C］//International Electron Devices Meeting. San Francisco, CA, USA: IEEE, 2002, 897-900.
［4］AIGNER R, KAITILA J, Ella J, et al. Bulk-acoustic-wave filters: Performance optimization and volume manufacturing ［C］//IEEE MTT-S International Microwave Symposium Digest. Philadelphia, PA, USA: IEEE, 2003, 2001-2004.
［5］ANDERS E, KATARDJIEV I, YANTCHEV V M. Tilted c-axis thin-film bulk wave resonant pressure sensors with improved sensitivity ［J］. IEEE Sensors Journal, 2012, 12(8): 2653-2654.
［6］WINGQVIST G, BJURSTRM J, HELLGREN A C, et al. Immunosensor utilizing a shear mode thin film bulk acoustic sensor［J］. Sensors and Actuators B: Chemical, 2007, 127(1): 248-252.
［7］TUKKINIEMI K, RANTALA A, NIRSCHL M, et al. Fully integrated FBAR sensor matrix for mass detection ［J］. Procedia Chemistry, 2009, 1(1): 1051-1054.
［8］JOHNSTON M L, KYMISSIS I, SHEPARD K L. FBAR-CMOS oscillator array for mass-sensing applications ［J］. IEEE Sensors Journal, 2010, 10(6): 1042-1047.
［9］CHUNG C J, CHEN Y C, CHENG C C. Influence of surface roughness of Bragg reflectors on resonance characteristics of solidly-mounted resonators ［J］. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2007, 54(4): 802-808.
［10］LIU Y, SHEN Y, DUAN F, et al. Solidly mounted resonators fabricated for GHz frequency applications based on MgxZn1-xO piezoelectric film ［J］. Vacuum, 2017, 141: 254-258.
［11］沈勇, 刘一剑, 杨翰林, 等. MgxZn1-xO压电薄膜表面粗糙度对SMR性能的影响 ［J］.微纳电子技术, 2014, 51(12): 776-779.
SHEN Yong, LIU Yijian, YANG Hanlin, et al. Influence of the surface roughness of MgxZn1-xO piezoelectric thin films on characteristics of the SMR ［J］. Micronanoelectronic Technology, 2014, 51(12): 776-779.
［12］KIM E K, LEE T Y, HWANG H S, et al. Improvement of the crystallinity of ZnO thin films and frequency characteristics of a film bulk acoustic wave resonator by using an Ru buffer layer and annealing treatment ［J］. Superlattices and Microstructures, 2006, 39(1-4): 138-144.
［13］LIU Y, LI Z, YANG Z, et al. Novel design and performance of the solidly mounted resonator with an AlN-buffered ZnO piezoelectric film ［J］. Vacuum, 2018, 154: 11-17.
