An Optically Driven Microgripper Based on Photostrictive Materials

Abstract

Abstract:

Abstract： The microgripper is widely used in microassembly and microoperation application. Aiming at the problem of the existent microgripper, an optical microgripper based on the PLZT bimorph cantilever structure was presented. As the core component of optical microgripper, the photostrictive effect of PLZT ceramic was studied and a novel photostrictive mathematical model was established. Besides, the drive characteristic of PLZT bimorph was derived. Furthermore, the flexible hinged magnifying mechanism was designed and the theoretical calculation of the loading capacity of flexure hinge was conducted. The calculation results show that the carrying capacity of flexure hinges can meet the operating requirements. The optical microgripper can provide wireless remote optically control without electromagnetic disturbance and can pick and place controlled by the illumination. A displacement amplification of 24 and a maximum stroke of 3.880 mm are achieved, which can satisfy the operating requirement of most microobjects.

Key words: photostrictive material, microgripper, opticallydriven, mathematical model

CLC Number:

TP 241.3

HUANG Jiahan,WANG xinjie,WANG Jiong. An Optically Driven Microgripper Based on Photostrictive Materials[J]. Journal of Shanghai Jiaotong University, 2014, 48(12): 1681-1687.

References

［1］Agnus J, Nectoux P, Chaillet N. Overview of microgrippers and design of a micromanipulation station based on a MMOC microgripper ［C］//Proceedings of 2005 IEEE International Symposium on Computational Intelligence in Robotics and Automation. Piscataway, NJ: IEEE Press, 2005: 117123.

［2］Menciassi A, Eisinberg A, Izzo I, et al. From macro to micro manipulation: models and experiments ［J］. IEEE/ASME Transactions on Mechatronics, 2004, 9(2): 311320.

［3］Volland B E, Heerlein H, Rangelow I W. Electrostatically driven microgripper ［J］. Microelectronic Engineering, 2002, 6162: 10151023.

［4］CHEN Tao, SUN Lining, CHEN Liguo, et al. A hybridtype electrostatically driven microgripper with an integrated vacuum tool ［J］. Sensors and Actuators A: Physical, 2010, 158(2): 320327.

［5］王代华, 杨群. 一种压电致动微夹钳及其开环位移特性［J］. 纳米技术与精密工程, 2010, 8(1): 4753.

WANG Daihua, YANG Qun. A piezoelectrically driven microgripper and its openloop displacement characteristics ［J］. Nanotechnology and Precision Engineering, 2010, 8(1): 4753.

［6］Zubir M N M, Shirinzadeh B, Tian Y L. A new design of piezoelectric driven compliantbased microgripper for micromanipulation ［J］. Mechanism and Machine Theory, 2009, 44(12): 22482264.

［7］虞启凯, 游有鹏, 韩江义. 集成三维力传感器的微夹持器设计与试验［J］. 上海交通大学学报, 2012, 46(6): 972976.

YU Qikai, YOU Youpeng, HAN Jiangyi. Development and application of microgripper integrating triaxial force sensor ［J］. Journal of Shanghai Jiaotong University, 2012, 46(6): 972976.

［8］席文明, 钟辉. 电磁力驱动的微夹持技术［J］. 纳米技术与精密工程, 2008, 6(3): 195198.

XI Wenming, ZHONG Hui. Microtweezer technology driven by electromagnetic force ［J］. Nanotechnology and Precision Engineering, 2008, 6(3):195198.

［9］Kim D H, Lee M G, Kim B, et al. A superelastic alloy microgripper with embedded electromagnetic actuators and piezoelectric force sensors: numerical and experimental study ［J］. Smart Materials and Structures, 2005, 14(6):12651272.

［10］Andersen K N, Carlson K, Petersen D H, et al. Electrothermal microgrippers for pickandplace operations ［J］. Microelectronic Engineering, 2008, 85(56): 11281130.

［11］Ivanova K, Ivanov T, Badar A, et al. Thermally driven microgripper as a tool for micro assembly ［J］. Microelectronic Engineering, 2006, 83(49):13931395.

［12］Kyung J H, Ko B G, Ha Y H, et al. Design of a microgripper for micromanipulation of microcomponents using SMA wires and flexible hinges ［J］. Sensors and Actuators A: Physical, 2008, 141(1): 144150.

［13］Vasudev A, Jagtiani A, Du L, et al. A lowvoltage droplet microgripper for microobject manipulation ［J］. Journal of Micromechanics and Microengineering, 2009, 19(7): 075005.

［14］Liang L, Wang S P, Cao F. Characteristics of photomechanical device using PLZT wafer ［C］//Proceedings of the 2nd IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications. Piscataway, NJ: IEEE Press, 2006: 14.

［15］Saitoh S, Kametani M. Photostrictive device［P］. United State: 5585961. 19961217.

［16］Poosanaas P. Photovoltaic and photostrictive effects in LanthanumModified Lead Zirconate Titanate ceramics ［D］. PA, USA: Pennsylvania State University, 1999.

［17］中田毅,曹东辉，森川泰，等, 光サーボシステムの基礎的研究: PLZT素子を用いたバイモルフ形光アクチュエータの動特性推定［J］. 日本機械学会論文集：C編, 1993, 59(564): 24702476.

［18］吴鹰飞，周兆英．柔性铰链设计计算［J］. 工程力学，2002, 19(6): 136140.

WU Yingfei, ZHOU Zhaoying. Design of flexure hinges ［J］. Engineering Mechanics, 2002, 19(6):136140.

［19］王新杰. PLZT光致伸缩特性及光电层合回转薄壳主动控制的研究［D］. 哈尔滨:哈尔滨工业大学机电学院，2011.

[1]	WANG Zekun, ZHANG Fuxi. Modeling and Experimental Study of Tin Whiskers for 3D Electronic Packaging [J]. Journal of Shanghai Jiao Tong University, 2021, 55(11): 1445-1452.
[2]	WANG Wei, LI Aote, YU Junli. A Design Method for Flow Distribution in Micro-Combustor Based on Target Flow Fitting [J]. Journal of Shanghai Jiaotong University, 2020, 54(9): 1000-1006.
[3]	LI Meng (李蒙), ZHANG Yong* (张勇), LIU Fengyu (刘峰宇), YIN Chengliang (殷承良). Manual Transmission Gear Rattle Vibration Research Based on Mathematical and Multi-Body Dynamics Co-simulation and Experiment [J]. Journal of Shanghai Jiao Tong University (Science), 2019, 24(4): 524-533.
[4]	LIANG Xiaoyang,MA Ning,LIU Han,GU Xiechong. Test on Maneuverability in the Vertical Plane of a Revolution Submersible at Large Attack Angle in Circulating Water Channel [J]. Journal of Shanghai Jiaotong University, 2019, 53(12): 1395-1403.
[5]	HU Ming,WANG Jiong,FAN Yiqing. Mathematical Model of Orifice Outflow for Magnetorheological Fluid [J]. Journal of Shanghai Jiao Tong University, 2017, 51(9): 1065-1070.
[6]	Li-jie WU, Juan YU, Jian-sheng SHI, Cheng-min WANG, Zhi-wei BI, Jiao GUO. Study on the Evolution Law of Potassium with Long Time Scale Climate Change in Jiangjun Loess Section of the Middle Reaches of the Jinghe River [J]. Journal of Shanghai Jiaotong University (Agricultural Sciences), 2016, 34(1): 69-73.
[7]	CHEN Xia,ZHANG Jing，XU Guangyan. Three-Dimension Path Planning for Unmanned Aerial Vehicle Under Moving Threat [J]. Journal of Shanghai Jiaotong University, 2014, 48(10): 1400-1405.
[8]	FANG Jihua，GU Bo，ZHANG Jie. Mathematical Model and Performance Analysis with Variable Condition of Enthalpy Recovery Wheel [J]. Journal of Shanghai Jiaotong University, 2014, 48(06): 809-815.
[9]	BAO Xi-rong1 (包喜荣), LIU Yu-yan1 (刘宇雁), LI Ge1 (李革), CHEN Lin1 (陈林) WANG Jian-guo1 (王建国), WU Zhang-zhong2 (吴章忠), TIAN Zhong-liang2 (田仲良). Research and Application of Pre-bending Automatic Control Models of 100 m Rail [J]. Journal of shanghai Jiaotong University (Science), 2012, 17(4): 465-469.
[10]	ZHAO Fu-Hai-a, b , HUA Xue-Ming-a, b , YE Xin-a, b , WU Yi-Xiong-a, b , c . Mathematical Model of Quasi-state Temperature Distribution of Hot-Wire during Hot-Wire TIG Welding Process [J]. Journal of Shanghai Jiaotong University, 2012, 46(07): 1063-1068.
[11]	Xu J.; Wu S.-L.; Guo X.-Y.; Kou M.-Y.. Numerical simulation of thermal and iron ore reduction conditions in pre-reduction shaft furnace based on reducing gas composition and temperature [J]. J Shanghai Jiaotong Univ Sci, 2011, 16(3): 375-379.
[12]	JIA Wen-Hua- , YIN Chen-Bo. Modeling and Stability Analysis of a Pressure Compensator for Flow-Control Valve [J]. Journal of Shanghai Jiaotong University, 2011, 45(04): 561-564.
[13]	ZHU Zhi-Xia-1, LI Bei-2. Wave-current Numerical Model for Shanghai Nanhuizui Inning Project [J]. Journal of Shanghai Jiaotong University, 2011, 45(04): 590-596.