Flow Field Characteristics of Hydrodynamic Polishing Base Plate with Different Structural Flow Passages

Abstract

Abstract:

Abstract： Three types of structural flow passages were designed, and flow field characteristics of hydrodynamic polishing base plates in different structure flow passages were studied. A mathematical model of flow field with constraint condition were built based on the liquid dynamic theory, and Matlab was used to compare and analyze the distributions of liquid dynamic pressure at different structural parameters. Relationships between buoyancy and film thickness, pressure distribution, structural parameters were obtained. Fluent software was used to calculate the pressure and speed distribution of flow fields. Theoretical and numerical results show that the largest buoyancy is produced by the parabolic structure flow passage，followed by the wedge structure flow passage, while the L structure flow passage is produces the smallest buoyancy. The flow velocity is relatively stable in the area where the workpiece is adhered, providing good condition for noncontact polishing process.

Key words: hydrodynamic polishing base plate, structural flow passage, flow field pressure, flow field speed

CLC Number:

O 786

LI Gang,ZHANG Li,WEN Donghui. Flow Field Characteristics of Hydrodynamic Polishing Base Plate with Different Structural Flow Passages[J]. Journal of Shanghai Jiaotong University, 2014, 48(11): 1606-1612.

References

［1］袁巨龙, 王志伟, 文东辉，等. 超精密加工现状综述［J］. 机械工程学报, 2007, 43(1): 3548.

YUAN Julong, WANG Zhiwei, WEN Donghui, et al. Review of the current situation of ultraprecision machining［J］. Chinese Journal of Mechanical Engineering, 2007, 43(1): 3548.

［2］Mimura H, Morita S, Kimura T, et al. Focusing mirror for xray freeelectron lasers［J］. Review of Scientific Instruments, 2008, 79(8): 083104.

［3］Joshi M, Morea S, Singh R K, et al. Experimental characterization of hydrodynamic nanopolishing of flat steel plates［J］. Precision Engineering, 2012, 36(3): 424434.

［4］Mittal R, Singh R, Joshi S. Elastohydrodynamic lubrication modeling of hydrodynamic nanopolishing process［J］. Journal of Manufacturing Science and Engineering, 2012, 134(4): 111.

［5］Watanabe J, Suzuki J, Kobayashi A. High precision polishing of semiconductor materials using hydrodynamic principle［J］. CIRP AnnalsManufacturing Technology, 1981, 30(1): 9195.

［6］Hung T C, Chang S H, Ding C H, et al. Improvement of residual error in hydrodynamic polishing by recursive error compensation strategy［J］. Microelectronic Engineering, 2012, 93: 2734.

［7］Hung T C, Ding C H. Smallwavelength form error compensation during hydrodynamic polishing［J］. International Journal of Machine Tools and Manufacture, 2011,51(12):880888.

［8］Zhao J, Cao Z Q, Zhan J M, et al. Research on hydrodynamic suspension nanoscale polishing for K9 optical glass［J］. International Journal of Computer Applications in Technology, 2007, 29(24): 257261.

［9］Huang Z G, Guo Z N, Chen X, et al. Microscopic machining mechanism of polishing based on vibrations of liquid［J］. Nanotechnology, 2007, 18: 111.

［10］计时鸣, 於加峰, 洪滔, 等. 槽形抛光工具形状对液流悬浮抛光加工效果的影响［J］. 农业工程学报, 2012, 28（增刊1）：8791.

JI Shiming, YU Jiafeng, HONG Tao, et al. Review of the current situation of ultraprecision machining［J］. Transactions of the Chinese Society of Agricultural Engineering, 2012, 28(Suppl 1): 8791.

［11］Hadfield M, Brebbia C A. Tribology and design II［M］. Southampton: WIT Press, 2012.

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