Measurement of Cross-plane Thermal Diffusivity of Thin-Films by Thermal Wave Method

Abstract

Abstract: Considering the difficulty of measuring cross-plane thermal diffusivity of thin films, a new method of measuring the cross-plane thermal diffusivity of thin films was approached by combining the apparatus of steady-state comparative-longitudinal heat flow (SCHF) method and the one-dimensional thermal wave in Angstr-m method. The propagation of thermal wave was analyzed and the cross-plane thermal diffusivity of thin films was deduced. By this method, three types of thin films samples (PTFE, polyvinylchloride and polypropylene) with various thicknesses ranging from 30 μm-1 mm were tested and this method is reliable.

Key words: thermal diffusivity, thermal wave, cross-plane, thin-film

CLC Number:

O 434

SHEN Chao, ZENG Zhi-Gang, SHEN Bin-Jie, HU Zhi-Yu. Measurement of Cross-plane Thermal Diffusivity of Thin-Films by Thermal Wave Method[J]. Journal of Shanghai Jiaotong University, 2012, 46(07): 1159-1162.

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