Flexible Micro Thermal Shear Stress Sensor Array

Journal of Shanghai Jiaotong University ›› 2012, Vol. 46 ›› Issue (06): 984-988.

• Automation Technique, Computer Technology • Previous Articles Next Articles

Flexible Micro Thermal Shear Stress Sensor Array

WANG Wen-Jun, LIU Wu, ZHANG Wei-Ping, CHEN Wen-Yuan, YANG Chun-Sheng, CUI Feng, WU Xiao-Sheng

(Science and Technology on Micro/Nano Fabrication Laboratory, Research Institute of Micro/Nano Science and Technology; Shanghai Jiaotong University, Shanghai 200240, China)

Received:2011-09-06 Online:2012-06-28 Published:2012-06-28
Supported by:
基金(9140A14010511JW0304)，微米/纳米加工技术重点实验室基金，教育部新世纪优秀人才支持计划(NCET 100583)资助

Abstract

Abstract: This paper presented a flexible micro thermal shear stress sensor array with double hot-line resistors, which can be used to detect the value and the direction of shear stress on complicated surface. Based on the principle of sensor, Comsol was used to simulate the temperature and flow field of the sensor. The process flowchart was designed. The release of polyimide from PDMS is easy after being soaked in alcohol. The sensor’s TCR and response frequency were tested. The experimental results show that the flowchart of process is simple and the parameters of structure are reasonable, it can achieve the required flexible sensor array.

Key words: thermal shear stress, micro electromechanical system （MEMS）, flexible sensor, polyimide

CLC Number:

TP 212
TH 39

WANG Wen-Jun, LIU Wu, ZHANG Wei-Ping, CHEN Wen-Yuan, YANG Chun-Sheng, CUI Feng, WU Xiao-Sheng. Flexible Micro Thermal Shear Stress Sensor Array[J]. Journal of Shanghai Jiaotong University, 2012, 46(06): 984-988.

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Flexible Micro Thermal Shear Stress Sensor Array

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