AlN Thin Film Resonator Operated in  Thickness Shear Mode Excited by Lateral Electric Field

Abstract

Abstract: Thin film bulk acoustic resonators operated in shear mode have promising applications in biochemical sensors. The shear mode AlN solid mounted resonator using lateral field excitation was presented. The resonator configuration consists of the highly coriented AlN piezoelectric film, the parallel electrodes on the film surface and the threeperiod SiO2/W acoustic Bragg reflector. The electric field characteristics were calculated by finite element modeling in order to design the electrode frame. The testing results of the finished device show that the pure shear mode wave can be excited at 2 GHz. The quality factor (Qs and Qp) and the effective electromechanical coupling content (K2eff) is 434, 393 and 0.97 %, respectively. The longitudinal wave is restrained by the effective lateral electric field and the frequency selectivity of the acoustic reflector.

Key words: film bulk acoustic resonator, shear mode, AlN film

Chen-Da, LI De-Hua, SONG Hong-Wei, WANG Cui-Ling, ZHANG Yu-Ping. AlN Thin Film Resonator Operated in Thickness Shear Mode Excited by Lateral Electric Field[J]. Journal of Shanghai Jiaotong University, 2011, 45(03): 327-0330.

References

［1］Cheon S J, Park J Y. Compact quintplexer module with passive triplexer for USCDMA handset applications［J］. Microw Opt Tech Let, 2010, 52(3): 540543.

［2］Kim D, Kim D H, Baek G H, et al. An FBARand LTCCbased RF frontend module for WiFi and WiMAX dualmode systems［J］. Microw Op Tech Let, 2010, 52(3): 753757.

［3］Zuo C, Van Der Spiegel J, Piazza G. 1.05GHz CMOS oscillator based on lateral fieldexcited piezoelectric AlN contour mode MEMS resonators［J］. IEEE Trans Ultrason Ferroelectr Freq Control, 2010, 57(1): 8287.

［4］Wingqvist G, Bjurstrom J, Hellgren A C, et al. Immunosensor utilizing a shear mode thin film bulk acoustic sensor［J］. Sens Actuators B, 2007, 127(1): 248252.

［5］Link M, Schreiter M, Weber J, et al. Solidly mounted ZnO shear mode film bulk acoustic resonators for sensing applications in liquids［J］. IEEE Trans Ultrason Ferroelectr Freq Control, 2006, 53(2): 492496.

［6］Corso C D, Dickherber A, Hunt W D. Lateral field excitation of thickness shear mode waves in a thin film ZnO solidly mounted resonator［J］. J Appl Phys, 2007, 101(5): 054514054517.

［7］Wingqvist G, Yantchev V, Katardjiev I. Mass sensitivity of multilayer thin film resonant BAW sensors［J］. Sens Actuator A, 2008, 248(59): 12581263.

［8］Zhang H, Kim E S. Micromachined acoustic resonant mass sensor［J］. J Microelectromech S, 2005, 14(4): 699706.

［9］FardehebMammeri A, Assouar M B, Elmazria O, et al. caxis inclined AlN film growth in planar system for shear wave devices［J］. Diam Relat Mater, 2008, 17(710): 17701774.［10］Wingqvist G, Bjurstrom J, Liljeholm L, et al. Shear mode AlN thin film electroacoustic resonant sensor operation in viscous media［J］. Sens Actuators B, 2007, 123(1): 466473.

［11］Gerlich D, Dole S L, Slack G A. Elastic properties of aluminum nitride ［J］. J Phys Chem Solids, 1986, 47(5): 437441.

［12］Carlotti G, Gubbiotti G., Hickernell F S, et al. Comparative study of the elastic properties of polycrystalline aluminum nitride films on silicon by Brillouin light scattering［J］. Thin Solid Films, 1997, 310(12): 3438.

［13］FardehebMammeri A, Assouar M B, Elmazria O, et al. Growth and characterization of caxis inclined AlN films for shear wave devices［J］. Semicond Sci Technol, 2008, 23(9): 5561.

［14］Weber J, Albers W M, Tuppurainen J, et al. Shear mode FBARs as highly sensitive liquid biosensors［J］. Sens Actuator A, 2006, 128(1): 8488.

［15］Su Q X, Kirby P, Komuro E, et al. Thinfilm bulk acoustic resonators and filters using ZnO and leadzirconiumtitanate thin films［J］. IEEE Trans Microw Theory Techniques, 2001, 49(4II): 769778.

AlN Thin Film Resonator Operated in Thickness Shear Mode Excited by Lateral Electric Field

Knowledge

Abstract

Cite this article

share this article

References

Related Articles 0

Recommended Articles

Metrics

Comments