Journal of Shanghai Jiao Tong University

Journal of Shanghai Jiaotong University

• Radiao Electronics, Telecommunication Technology • Previous Articles     Next Articles

Application of Inclined and Rotating UV Lithography in Preparation of Microneedles

JIANG Hongmin,ZHU Jun,CAO Ying,CHEN Xiang,CHEN Di

  

  1. （Institute of Micro/Nano Science and Technology, National Key Laboratory of Nano/Micro Fabrication Technology， Key Laboratory for Thin Film and Microfabrication of the Ministry of Education, Shanghai Jiaotong University，Shanghai 200030, China）
  • Received:2009-08-21 Revised:1900-01-01 Online:2010-08-31 Published:2010-08-31

Abstract: By improving the existing equipment of our laboratory, the process of inclined and rotating UV lithography in the fabrication of conical outofplane microneedles was researched and conical outofplane microneedles of PDMS were produced through pattern transfer between polymer materials by the SU8 photoresist mold. This method has the advantages of low cost and wide material applicability. The microneedle with the inclination of 67 °and the height of 353 microns was made by this method.

CLC Number: