利用卷对卷热辊压工艺连续、高效和粉末冶金成形技术精度高的优点,提出了一种在聚合物薄膜表面制备微结构粉末的热辊压成形工艺方法,构建了聚合物薄膜表面微结构粉末热辊压成形工艺试验系统并进行了粉末热辊压成形工艺试验,通过单因素试验研究了工艺参数(模具温度、辊压速度和辊压力)对成形质量的影响规律.结果表明,采用模具温度130~145℃,辊压速度0.2~0.8m/min和辊压力250~500N的粉末热辊压成形工艺参数,能够得到聚合物粉末充型完整的微金字塔阵列结构.
This study proposed a rolltoroll (R2R) powder hot embossing process for the fabrication of microstructures on polymer film by combining the merits of R2R hot embossing process and powder metallurgy technology. An R2R powder hot embossing system was developed and a series of embossing experiments were conducted. The influences of processing parameters, which included mold temperature, feeding speed and applied force, had been investigated systematically by using the onevariableatatime (OVAT) method. It was found that the completelyfilled micropyramid arrays could be fabricated by R2R powder hot embossing process under the mold temperature of 130—145℃, the feeding speed of 0.2—0.8m/min and the applied force of 250—500N.
[1]易培云, 彭林法, 来新民. 光学薄膜微细结构制造方法新进展[J]. 科学通报, 2015, 60(28/29): 27072718.
YI Peiyun, PENG Linfa, LAI Xinmin. Recent progress in fabrication methods for micro structures on optical thin film[J]. Chinese Science Bulletin, 2015, 60(28/29): 27072718.
[2]LEE J Y, KIM Y J, NAHM K B, et al. Optical simulation of micropyramid arrays for the applications in the field of backlight unit of LCD[C]∥IMID/IDMC ′06 DIGEST. 2006: 13431346.
[3]贺永, 傅建中, 陈子辰. 微热压印过程中聚合物流动形貌的研究[J].光学精密工程, 2008, 16(2): 270278.
HE Yong, FU Jianzhong, CHEN Zichen. Study on polymer flow profile in micro hot embossing[J]. Optics and Precision Engineering, 2008, 16 (2): 270278.
[4]NAGARAJAN P, YAO D. Rubberassisted micro forming of polymer thin films[J]. Microsystem Technologies, 2009, 15(2): 251257.
[5]FAGAN M D, KIM B H, YAO D. A novel process for continuous thermal embossing of largearea nanopatterns onto polymer films[J]. Advances in Polymer Technology, 2009, 28(4): 246256.
[6]YUN D, SON Y, KYUNG J, et al. Development of rolltoroll hot embossing system with induction heater for micro fabrication[J]. Review of Scientific Instruments, 2012, 83(1): 015108.
[7]VELTEN T, BAUERFELD F, SCHUCK H, et al. Rolltoroll hot embossing of microstructures[J]. Microsystem Technologies, 2011, 17(4): 619627.
[8]YI P, SHU Y, DENG Y, et al. Mechanism of forming defects in rolltoroll hot embossing of micropyramid arrays I: Experiments[J]. Journal of Micromechanics and Microengineering, 2015, 25(10): 105017.
[9]SAHLI M, GELIN J C, BARRIRE T. Replication of microchannel structures in WCCo feedstock using elastomeric replica moulds by hot embossing process[J]. Materials Science and Engineering: C, 2015, 55: 252266.
[10]银锐明, 范景莲, 钟定铭, 等. Fe2(MoO4)3/Si3N4复合粉末还原及热压微观组织结构分析[J].中南大学学报 (自然科学版), 2011, 42(4): 909914.
YIN Ruiming, FAN Jinglian, ZHONG Dingming, et al. Microstructure of Fe2(MoO4)3/Si3N4 composite powders by reduction and hot pressing[J]. Journal of Central South University (Science and Technology), 2011, 42(2): 909914.
[11]SRIVATSAN T S, WOODS R, PETRAROLI M, et al. An investigation of the influence of powder particle size on microstructure and hardness of bulk samples of tungsten carbide[J]. Powder Technology, 2002, 122(1): 5460.
[12]XU Y, TSUMORI F, KANG H, et al. Fabrication of micro patterned ceramic structure by imprinting process[J]. Journal of the Japan Society of Powder & Powder Metallurgy, 2011, 58(11): 673678.
[13]DENG Y J, YI P Y, PENG L F, et al. Experimental investigation on the largearea fabrication of micropyramid arrays by rolltoroll hot embossing on PVC film[J]. Journal of Micromechanics and Microengineering, 2014, 24(4): 045023.
[14]CHENG B, PRICE S, LYDON J, et al. On process temperature in powderbed electron beam additive manufacturing: Model development and validation[J]. Journal of Manufacturing Science and Engineering, 2014, 136(6): 061019.
[15]MONTES J M, CUEVAS F G, CINTAS J. Effective area in powder compacts under uniaxial compression[J]. Materials Science and Engineering: A, 2005, 395(1/2): 208213.