上海交通大学学报(自然版) ›› 2014, Vol. 48 ›› Issue (11): 1606-1612.
李刚,张利,文东辉
收稿日期:
2014-04-21
LI Gang,ZHANG Li,WEN Donghui
Received:
2014-04-21
摘要:
摘要: 针对动压浮离抛光盘流场特性优化问题,提出了楔形、L型、抛物线型3种典型的结构化流道.建立了流场约束数学模型,利用Matlab对比分析了不同结构参数下结构化流道环境产生液体动压的能力,得到了浮力与膜厚关系曲线、压力分布曲线以及浮力与各结构参数的关系曲线.同时,运用Fluent对3种结构化流道环境的流场压强与速度分布进行了仿真.理论计算与仿真结果表明:抛物线形结构化流道产生浮力的能力最强,楔形结构化流道次之,L形结构化流道远落后于前两种;工件安装区域形成的流场速度稳定,有利于非接触式抛光加工.
中图分类号:
李刚,张利,文东辉. 动压浮离抛光盘结构化流道的液流特性[J]. 上海交通大学学报(自然版), 2014, 48(11): 1606-1612.
LI Gang,ZHANG Li,WEN Donghui. Flow Field Characteristics of Hydrodynamic Polishing Base Plate with Different Structural Flow Passages[J]. Journal of Shanghai Jiaotong University, 2014, 48(11): 1606-1612.
[1]袁巨龙, 王志伟, 文东辉,等. 超精密加工现状综述[J]. 机械工程学报, 2007, 43(1): 3548.YUAN Julong, WANG Zhiwei, WEN Donghui, et al. Review of the current situation of ultraprecision machining[J]. Chinese Journal of Mechanical Engineering, 2007, 43(1): 3548.[2]Mimura H, Morita S, Kimura T, et al. Focusing mirror for xray freeelectron lasers[J]. Review of Scientific Instruments, 2008, 79(8): 083104.[3]Joshi M, Morea S, Singh R K, et al. Experimental characterization of hydrodynamic nanopolishing of flat steel plates[J]. Precision Engineering, 2012, 36(3): 424434.[4]Mittal R, Singh R, Joshi S. Elastohydrodynamic lubrication modeling of hydrodynamic nanopolishing process[J]. Journal of Manufacturing Science and Engineering, 2012, 134(4): 111.[5]Watanabe J, Suzuki J, Kobayashi A. High precision polishing of semiconductor materials using hydrodynamic principle[J]. CIRP AnnalsManufacturing Technology, 1981, 30(1): 9195.[6]Hung T C, Chang S H, Ding C H, et al. Improvement of residual error in hydrodynamic polishing by recursive error compensation strategy[J]. Microelectronic Engineering, 2012, 93: 2734.[7]Hung T C, Ding C H. Smallwavelength form error compensation during hydrodynamic polishing[J]. International Journal of Machine Tools and Manufacture, 2011,51(12):880888.[8]Zhao J, Cao Z Q, Zhan J M, et al. Research on hydrodynamic suspension nanoscale polishing for K9 optical glass[J]. International Journal of Computer Applications in Technology, 2007, 29(24): 257261.[9]Huang Z G, Guo Z N, Chen X, et al. Microscopic machining mechanism of polishing based on vibrations of liquid[J]. Nanotechnology, 2007, 18: 111.[10]计时鸣, 於加峰, 洪滔, 等. 槽形抛光工具形状对液流悬浮抛光加工效果的影响[J]. 农业工程学报, 2012, 28(增刊1):8791.JI Shiming, YU Jiafeng, HONG Tao, et al. Review of the current situation of ultraprecision machining[J]. Transactions of the Chinese Society of Agricultural Engineering, 2012, 28(Suppl 1): 8791.[11]Hadfield M, Brebbia C A. Tribology and design II[M]. Southampton: WIT Press, 2012. |
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